INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 93)

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XTC/3 Operating Manual
DEAD TIME . . . . . . . . . . 0.1 to 100.0 sec
This value is defined as the time difference between a change in % power and the
start of an actual change in rate. The default value is 1.
Figure 4-8 Dead Time
MAXIMUM POWER . . . . 0.0 to 100.0%
This parameter is used to set the maximum permissible % power level. The control
voltage output will not exceed this limit. The default value is 100.0%.
DENSITY . . . . . . . . . . . . 0.50 to 99.99 g/cm
3
This parameter is specific to the material being deposited onto the crystal. It is one
of two parameters that relate the mass loading on the crystal to a thickness.
The default value is 1.00 g/cm
3
.
Z-Ratio . . . . . . . . . . . . . . 0.100 to 9.999
This parameter is specific to the material being deposited. It is one of two
parameters that relate the mass loading on the crystal to a thickness.
The default value is 1.000. See
Chapter A for material density and Z-Ratio values.
R
A
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E
P
O
W
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R
RATE INCREASE
Power
Rate
POWER INCREASE
TIME
Control DT