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1 menu display, 2 operate display – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

3.3.1 Menu Display

Pressing MENU while on any other screen will display to the Menu screen.

The Menu screen allows navigation between all other screens.

1

Using

or

,

a list of screens can be scrolled through to select

the desired screen.

2

Press MENU to move the display to the selected screen.

Figure 3-3 Menu Display XTC/3M

If a lock code has been set up from the front panel to prevent unauthorized
parameter entry, the lock code L Lock message will appear on this screen in the
upper right corner.

If a lock code has been set up via Remote Communications, the R Lock message
will appear instead.

To enable entering or changing parameters, move the cursor to the lock code
message (located to the right of Sensor), enter the lock code and press ENTER.
The lock code message will disappear.

XTC/3 will be re-locked after entering the Operate screen.

3.3.2 Operate Display

The Operate screen will appear on power-up following the temporary initialization
screen. It contains information pertinent to the currently active film and process.
Information on the Operate screen includes the user-entered name of the process
and film (XTC/3M only), the Rate, Power, Thickness, State, StateTime, Layer Time,
Process Time (XTC/3M only), Source and Sensor in use, Crystal Number,
Percent Life, S and Q values.