INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 151)

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XTC/3 Operating Manual
5.3.5 XTC/2 Message Strings
5.3.5.1 XTC/2 ECHO Command
Echoes the message, i.e., returns the sent message.
The format is: E message string
5.3.5.2 XTC/2 HELLO Command
The HELLO command will return the string XTC/y VERSION x.xx where y is 2 or C, depending on
the RS232 protocol set, and x.xx is the software revision code.
The format is: H
5.3.5.3 XTC/2 QUERY Command
The Query command returns information concerning current XTC/3 parameter
values.
The format of the query command is:
Q pp F - Query parameter pp of film F or Q pp L for layer parameters. A space is
used as a delimiter between Q and pp as well as pp and F, where F (or L), is a digit
between 1 and 9, L is a digit between 0 and 3, inclusive, and represents the
interrogated film or layer number.
NOTE: If pp is set to 99, output all parameters in the order specified below;
each parameter is separated by a space. This command allows a rapid
block transfer of data which is convenient for downloading films.
Table 5-7 XTC/2 parameter definition table (for QUERY and UPDATE commands)
XTC/2 PP XTC/3 Parameter Range
0 Rise Time 1 0 - 5999 or 00:00 - 99:59
1 Soak Power 1 0.0 - 100.0
2 Soak Time 1 0 - 5999 or 00:00 - 99:59
3 Rise Time 2 0 - 5999 or 00:00 - 99:59
4 Soak Power 2 0.0 - 100.0
5 Soak Time 2 0 - 5999 or 00:00 - 99:59
6 Shutter Delay 0 to 1
7 New Rate 0.0 - 999.9
8 Rate Ramp Time 0 - 5999 or 00:00 - 99:59
9 Idle Ramp 0 - 5999 or 00:00 - 99:59
10 Idle Power 0.0 - 100.0
11 Time Power 1 or 0 or 'Y' or 'y' or 'N' or 'n'