INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
NOTE: The following are Deposit states.
CONTROL DELAY
(Deposit state)
Constant Power at Soak Power 2. Begins
rate control when the control delay time
elapses. [Delay Option, Control Delay,
Control Delay Time]
Active
Active
DEPOSIT
Thickness zeroed upon entry or reset to
stored value on Stop/Start without Reset.
Rate control. [Rate, Final Thickness, PID
Control, Process Gain, Primary Time
Constant, System Dead Time]
Active
Active
RATEWATCHER
(SAMPLE)
(Deposit state)
Rate control. [RateWatch Accuracy]
Active
Active
RATEWATCHER
(HOLD)
(Deposit state)
Constant power, based on last sample’s
average power. [RateWatch Hold Time]
Active
Inactive
RATE RAMP
Rate control, desired rate changing. [New
Rate , Start Ramp, Ramp Time ]
Active
Active
MANUAL
Source power controlled by handheld
controller or front panel Up/Down cursor
keys.
Active
Active
TIME-POWER
Crystal failed; source maintained at
average control power prior to crystal
failure. [Time Power Yes/No]
Active
Active
NOTE: The following are Post-Deposit states.
IDLE RAMP
Source changing to Idle Power. [Idle Ramp
Time, Idle Power]
Inactive
Inactive
IDLE (=0% Power)
Source maintained at zero power; will
accept a START command.
Inactive
Inactive
IDLE (>0% Power)
Source resting at Idle Power; will accept a
START command. Rise 1 and Soak 1 will
be skipped.
Inactive
Inactive
STOP
Note: Stop is not a
separate state but a
suspension of the current
state.
Source output set to zero power. The
display is frozen at the last rate and
thickness values.
Ref:
Recovering from STOP, see section
Inactive
Inactive
Table 3-1 State descriptions (continued)
STATE
CONDITION
RELAY CONTACT
STATUS
Source
Shutter
Sensor
Shutter