INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

Idle Ramp

The next two parameters define an idle ramp provided to maintain the control
voltage power level after the Deposit state. Control voltage is ramped from the
power level at the end of the Deposit state to the Idle Power level. The control
voltage is maintained at the Idle Power level until XTC/3 enters STOP or until the
next layer, using the specified source, is started, or the turret source is rotated.

NOTE: If the next layer started uses the source at the non-zero idle power, Rise 1

and Soak 1 states are skipped in the pre-deposit sequence.

IDLE RAMP TIME . . . . . . . . . . . . . . 00:00 to 99:59 min:s

This is the time interval over which the source power is ramped linearly from
the power level at the end of Deposit to the Idle Power. The default value is
00:00.

IDLE POWER . . . . . . . . . . . . . . . . . 0.0 to 100%

This is one of two parameters used to effect an Idle Power Ramp. This value
is the power level at which the source is maintained after the DEPOSIT phase.
If the material will be used in a subsequent layer, and if it is desired to reduce
cycle time, IDLE POWER should be set to the same value
as SOAK POWER 1.
RISE TIME 1 and SOAK TIME 1 states will be skipped if the IDLE POWER is
non-zero. The default value is 0%.