INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

Configure General Parameters

From the General Parameter display, three sub-screens can be accessed:
Process; Hardware; and Comm Info. The Process screen provides for a
number of selections including which process (XTC/3M) or film (XTC/3S) to
run. The Hardware screen allows selecting the sensor type, source control
voltage range and polarity, chart recorder mode, audio feedback and LCD
dimmer time. In the Comm Info screen, RS232 baud rate and protocol are
selected as well as IP Address and Net Mask for the optional TCP/IP interface.

Configure the Sensor(s)

Configuring the sensor type involves designating whether the sensor is a
Single, CrystalTwo, CrystalSix, Crystal12, Rotary or Dual Head. These
parameters are on the Hardware page of the General Parameter display.

Configure the Source(s)

Configuring the sources involves selecting the digital-to-analog voltage
converter (DAC) output voltage range and polarity on the Hardware page of the
General Parameter display. If a source has more than one crucible, this is
set up in the Source screen of the Film Parameter display.

Configure Communications

If required, select the appropriate RS232 baud rate and protocol and optional
Ethernet interface IP Address and Net Mask in the Comm Info sub-screen
of the General Parameter display.

Configure I/O

In XTC/3S the I/O is fixed. In XTC/3M, inputs and outputs are programmable.