INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 136)

5 - 24
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
29
(0x1d)
Z-Ratio Float
x.xxx
xx.xx
xxx.x 0.100 9.999
30
(0x1e)
Time Power 1=Yes,
0 = No
Int 0 1
31
(0x1f)
Delay option 0 = None
1 = Shutter
2 = Control
3 = Both
Int 0 3
32
(0x20)
1 Transfer Sensor 1=Yes, 0 = No
Cannot change if film is
running
Int 0 1
33
(0x21)
1 Transfer Tooling % Float
xxx.x 10.0 500.0
34
(0x22)
1 Control Delay
Time
MM:SS
(Seconds)
Int 0 99:59
(5999)
35
(0x23)
2 Ion Assisted
Deposit
1=Yes,
0 = No
Int 0 1
36
(0x24)
Graph Label 0 = Rate Dev
1 = Power
Int 0 1
37
(0x25)
Graph Scale 0 = 5
1 = 10
2 = 20
3 = 40
Int 0 3
255
(0xff)
2 All Parameters
1 See section 4.2.3.5, Option, on page 4-14
2 Cannot change when a film is running.
Table 5-2 Standard film parameters (continued)
UF
(0x5546)
Command
ID
Name Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit