INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

Page 157

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XTC/3 Operating Manual

1 = Selection active, 0 = default state for selection

Also see S22 below.

NOTE: In the default configuration, bits 8 and 9 will return values of 1 whereas the

defaults for these bits was 0 in XTC/2. If it is desired to make the S20
response equal to XTC/2 default response, change the Recorder Range to
100 and the Audio Feedback to Yes, both per

section 4.4.2 on page 4-21

Table 5-11 S20 Command Input status

Byte #

Function

State

# 1

Test Mode

(0 = off, 1 = on)

# 2

Parameter Lock

(0 = off, 1 = on)

# 3

Control Mode

(0 = deposit, 1 = etch)

# 4

Stop On Alarms

(0 = no, 1 = yes)

# 5

Stop on Max Power

(0 = no, 1 = yes)

# 6

# 7

# 8

Recorder Type
(in order:
Byte 6, 7, 8)

000 designates Rate, 100 Å/s full scale (unfiltered)
001 designates Rate, 1000 Å/s full scale (unfiltered)
010 designates Thickness, 100 Å full scale
011 designates, 1000 Å full scale
100 designates Power %
101 designates Rate Deviation (±50 Å/s)
110 designates Rate 100 Å/s full scale - smoothed
111 designates Rate 1000 Å/s full scale - smoothed

# 9

Beep On/Off

(0=on, 1=off)

# 10

Backlight Dim

(0 = no, 1 = yes)

# 11

Start Layer without
backup crystal

(0 = no, 1 = yes)
NOTE: See

section 3.6.9 on page 3-30

for

description

# 12

Input Option

0 = Standard, 1 =Film Select

# 13

Not used, returns 0

# 14

# 15

Sensor Type
(in order: Byte 14, 15)

00 = Single Head(s)
10 = Single CrystalSix on sensor 1
11= Two CrystalSix sensors

# 16

Source Control
Voltage polarity

0 = neg, 1 = pos