INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 137)

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XTC/3 Operating Manual
5.2.2.4.4 Standard Update General Parameters
Command:
UG
Command ID = See “UG Command ID” column of Table 5-3 .
Parameter Value = |
Integer = 4 byte, low to high
Float = 4 byte, ANSII standard, single precision, low to high
Description: Type of parameter value depends on command ID, see
“DataType” column of
Table 5-3 .
Response:
None (Just header and trailer)
Special Case: UG255 will
update all general parameters in numeric order.
NOTE: Some limitations may apply as to when general parameters
may be updated.
Table 5-3 Standard general parameters
UG
(0x5547)
Command
ID
Name Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit
0
(0x00)
1 Process to run
(XTC/3M only)
Can be changed only
in Ready or Idle in last
layer Int
1 99
1 Film to run
(XTC/3S only)
1 9
1
(0x01)
Start Layer Without
Backup Xtal
1 = Yes, 0 = No Int 0 1
2 (0x02) Stop on Alarms 1 = Yes, 0 = No Int 0 1
3 (0x03) Stop On Max Power 1 = Yes, 0 = No Int 0 1
4
(0x04)
1 Dep/Etch Mode 0 = Deposit
1 = Etch
Int 0 1
5 (0x05)
1
Test 1 = Yes, 0 = No Int 0 1