INFICON HAPSITE ER Chemical Identification System - Manual (Page 491)

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HAPSITE ER Operating Manual
16.6.1 Bakeout Procedure
A bakeout can be performed with or without the use of the Service Module. A
bakeout heats the NEG pump to 700 degrees Centigrade for a specified length of
time (usually 2 hours).
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. See Figure 16-10 .
Figure 16-10 Service Button on the Service Module Tab
3 Set the Bakeout Power to 30. The Bakeout Time is usually set to 2 hours. See
Figure 16-11 .
Figure 16-11 Service Window
4 Click the Bakeout button.