INFICON HAPSITE ER Chemical Identification System - Manual (Page 477)

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HAPSITE ER Operating Manual
Chapter 16
Maintenance
16.1 Introduction
The HAPSITE instrument is designed to require minimal service. Repairs will
normally be carried out at the factory or other INFICON Service Facilities.
Preventive maintenance includes the cleaning of the air filters and the replacement
of certain consumables.
Additionally, the HAPSITE checks the system components each time the system is
started and will notify the user if the following items need maintenance:
 Turbo Pump (Service Module)
 Roughing Pump (Service Module)
 Ion Pump (HAPSITE)
 NEG Pump (HAPSITE)
For Turbo Pump, Roughing Pump, and Ion Pump maintenance, service must be
performed by a qualified INFICON service representative. (See
Chapter 17,
Customer Support .)
NEG Pump installation and removal is explained later in this chapter.