INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 99)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 97 of 276 ^
Related Film Parameters: (XTAL) RATE SAMPLING OFF,TIMED,INTELL.
(XTAL) SAMPLE INTERVAL 0:01-99:59 MM:SS
(XTAL) SAMPLE DWELL TIME 0:01-99:59 MM:SS
(XTAL) SAMPLE QUAL 1-50%
(XTAL) SAMPLE ALARM TIME 0:01-99:59 MM:SS
SECTION 3.10
Manual Power Control
The Manual Power Mode is a method of controlling the source power manually. It is useful to
initially determine the operating point for the soak and deposition levels. The Manual Power Mode can be
entered from the RunTime Screen or either of the 2 STATUS screens (see section 3.0). In addition, a film
and process must be running (not stopped) to enter the Manual Power mode. Section 3.20 defines and
describes a test program. With this test program is running, all of these functions can be exercised and their
effects observed.
Hand Controller / Manual Power Mode
Although familiarization with the operation of the manual power control can be accomplished by
reading alone, with the multilayered test deposition program mentioned above running and used as an aid,
familiarization with the operation of the manual power control can be enhanced. By pressing the fixed front
panel MANUAL key, the STC-2002 is placed in a phase similar to DEPOSIT. MANUAL is shown as the
current phase displayed on the RunTime screen. The I/O event status designated as source shutter will
indicate open and the rate control loop is disabled during the Manual Power Mode (with test program
running). When in the MANUAL mode, a means of power adjustment using either one of two vertical
ARROW keys on the pendent becomes available. After entering the MANUAL mode, press one of the two
vertical ARROW keys (see figure 3.12) and observe the Run Time screen. The power value indication
shown by the middle LED display section (front panel is labeled with POWER-%) will increase or decrease
depending on the arrow key pressed. You can also use the hand controller (pendent) to put the unit in a
STOPPED state by pressing the pendent STOP button. Pressing both of the pendent arrow keys
simultaneously, zeroes the power value. The twelve foot coiled cord of the hand controller (pendent) plugs
into the jack in the lower left corner of the front panel labeled MANUAL CONTROL.
instruments
STOP
INC DEC
MANUAL POWER
Figure- 3.13: Hand Controller (pendent).