INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 27)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 2.XX e page 25 of 276 ^
. general case usage . (differences: few) traditional .
The typical usage would not be much beyond the simplest case as described above. This would include
more films (implying more materials), multiple deposits of the same or different materials or more
processes. In addition, a multiple crystal head with an integral either/or shutter is sometimes used as an
input to 2 sensor inputs. Although these configurations represent most systems, the capabilities of the STC-
2002 are far beyond these necessities.
[A multiple crystal head that is used as an input to a single sensor input is
not supported with this product (no switching with zeroing on a single input, etc.).]
. adding complications (more inputs, relays, crystals, ext. voltages, recorders, comm. terminals,
indexer, etc. )
Examples of added usage complications would be using (or using more) digital inputs, relays, more
crystals, more sensor channels, external I/O voltages, strip chart recorders, communication terminals, e-
beam source indexer (model: SRT-400), etc.
A pendent is supplied for some remote front panel functions and manual mode usage. The pendent plugs
into the front panel of the STC-2002 and has a 6 foot coiled cord.
A sensor card has 2 identical sensor inputs and 2 identical analog outputs. The 2 analog outputs, in a single
sensor card system, are typically used as 1 control output voltage and 1 strip chart output voltage. When
multiple sensor cards are used, the strip chart recorder output can be set up on any of the analog outputs but
only one strip chart recorder function per system is programmatically allowed. Each of the two analog
outputs arrive at the external connector in 2 polarities: isolated and a negative version of the isolated
output. A less expensive non-isolated version of the card is TBD? There are slots for 4 sensor cards (1
sensor card is standard in the STC-2002). Crystal sensor and control voltage output usage has been
described above. If one of the analog outputs is programmed for strip chart recorder output, a software
menu change can convert the strip chart output into a second isolated control voltage output.
There is another group of 4 slots for either input cards and/or output cards (1 of each type in the first 2 slots
are standard in the STC-2002). Input cards have 8 opto-coupled inputs. Output cards have 8 form C
(SPDT) relays. Inputs are typically used to trigger events at some meaningful point in the process or to
(SEQuencing Mode)
Step# (or Layer#)
Mode: Skip, Stop, Auto, End, Wait
Film #
Thickness
-OR-
Implicit Process
(NON-SEQuencing Mode)
Film #
Density
Z Factor
Setpoint Limits
Rate Ramp Power/Time
Soak Power/Time
Deposit Rate Values
PID Loop
Max Power Values
Shutter Parameters
Rate Sampling Values
Film Fail Mode
Xtal Loop Stability/Quality
Xtal Life Bounds
Graph Plotting Values
Map Select
Pocket Select
EtchingMode
Source Power Options
Master Tooling
Xtals: Start, Backup, Active
Xtal Drop Filter Mask
Indexer
Channel X:
Start mode
Fail action
Backup List
Tooling
Weight