INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 113)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 111 of 276 ^
Averaging with Multiple Active Crystal Sensors and Averaging For Multi Layer Depositions
This adds another level of complexity to the serial multi sensor description above. Instead of a
single sensor being active, the map parameter CH x START MODE defines 2 or more channels as active,
the MIN START XTALS parameter reflects this same number or less but at least 2, the MIN ACTIVE
XTALS =< MIN START XTALS (BACKUP channels are optional). By selecting more than 1 active
sensor channel, averaging is automatically assumed. Multi layer would use, as previously described,
separate film/map combinations for each layer except in this case, more than 1 channel is active for each of
the multiple layers. The intent here is toward increased accuracy in a multiple layer material deposition.
The following parameters are described in greater detail in sections 3.5 and 3.15.
Related Conf. Parameters: Need S
ource /S ensor Card 1 OFF/ON
Need S ource /S ensor Card 2 OFF/ON
Need S ource /S ensor Card 3 OFF/ON
Need S ource /S ensor Card 4 OFF/ON
Related Film Parameters: FILM Fail Mode TIME P O W E R, ABORT IF FAIL
C on t ro l Loop Qual L imits 0 to 9
XT A L Stability S (Limits) 0 to 9
XTAL Life Bounds 0.0-100.0%
S ource S ensor MAP SELECT 1 - 30
Related Map Parameters: Master Tooling
Value 10.0% - 400.0%
Minimum Start Xtal Channels 1 – 8 minimum channels
Minimum Backup Xtal Channels 0 – 7 minimum channels
Minumum Active Xtal Channels 1 – 8 minimum channels
Xtal Channel Drop Filter*
NONE, BALANCE [dropped Xtal ch Failure]
Channel x Start Mode OFF, ACT IVE , STANDBY
Channel x Fail Action Mode NONE, ABORT FILM
Channel x Backup List X – XXXXXXXX (1 item list to 8 item list),
[where X = 1 to 8 (in each position w/o
redundancies, list extends to 0-8 for a 1 item
list)]
Channel x Tooling Value 10.0% - 400.0%
Channel x Weight 10.0% - 400.0%
*averaging only