INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 8)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 6 of 276 ^
Tooling: Material Density & Z-Factor ............................................................................................................... 37
Power Related Menu Parameters ....................................................................................................................... 37
Power Related Menu Parameter Dependencies ................................................................................................. 38
Initial Programming Setups (menu parameters) .................................................................................. 40
Menu Parameter Values & Programming After Memory Purge ........................................................................ 40
Menu Parameter Values & Programming After Factory Restored Memory ...................................................... 41
I/O Programming Introduction ............................................................................................................ 42
Boolean Logic Discussion ................................................................................................................................. 43
Simple I/O Program Examples .......................................................................................................................... 44
How To Develop I/O Programs ............................................................................................................ 48
MENU PROGRAMMING AND OPERATION DETAILS [3.XX] ................................................................. 49
S ECTION 3.0 ................................................................................................................................................ 49
LCD Touch Panel Overlay ................................................................................................................... 49
Front Panel Definitions ........................................................................................................................ 50
S ECTION 3.1 .............................................................................................................................................. 56
Navigating Through STC-2002 Menus................................................................................................. 56
Menu Tree ............................................................................................................................................. 57
S ECTION 3.2 .............................................................................................................................................. 58
RunTime Screen Description ................................................................................................................ 58
S ECTION 3.3 .............................................................................................................................................. 60
Main Menu Description........................................................................................................................ 60
S ECTION 3.4 .............................................................................................................................................. 63
Films And Processes............................................................................................................................. 63
S ECTION 3.5 .............................................................................................................................................. 63
Film Edit/Review Mode ........................................................................................................................ 63
Film Parameter Checksum ................................................................................................................................. 67
Film Parameter Lock Code ................................................................................................................................ 67
Film Parameter: Source Sensor Map Select ....................................................................................................... 68
Review SS MAP ................................................................................................................................................ 68
Selecting the Active Film in Non-Sequencing Mode ......................................................................................... 69
Detailed Film Parameter Descriptions ................................................................................................ 71
Detailed Map Parameter Descriptions................................................................................................. 79
S ECTION 3.6 ............................................................................................................................................. 83
Editing Processes................................................................................................................................. 83
Process Lock Code ............................................................................................................................................ 93
Factory Restoration vs. Purged Settings ............................................................................................................ 93
Changing Memory Settings ............................................................................................................................... 93
S ECTION 3.7 .............................................................................................................................................. 93
Set Active Process................................................................................................................................. 93
S ECTION 3.8 .............................................................................................................................................. 94
Non-Sequencing Differences ................................................................................................................ 94
S ECTION 3.9 .............................................................................................................................................. 96
Software Controlled RunTime Screen Keys.......................................................................................... 96
L/Q key (Crystal Quality) .................................................................................................................................. 96
SMPL key (Sample and Hold)........................................................................................................................... 96
S ECTION 3.10 ............................................................................................................................................ 97
Manual Power Control......................................................................................................................... 97
Using Pendent.................................................................................................................................................... 97
Using LCD keys ................................................................................................................................................ 98
S ECTION 3.11 ............................................................................................................................................ 99
STC-2002 Shutter Delay....................................................................................................................... 99
S ECTION 3.12 ............................................................................................................................................ 99
Deposition Source Control Loop Description ...................................................................................... 99
S ECTION 3.13 .............................................................................................................................................. 101
Film Phases And Parameter Groups ............................................................................................................. 101
S ECTION 3.14 .......................................................................................................................................... 102
System Configuration ......................................................................................................................... 102