INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 19
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 1.XX
e page 17 of 276 ^
I/O Function elements:
[Menu end point: I/O Setup
Menu path: Main/Executive menu/ I/O Setup]
I/O Relay Functions
user I/O program
(8 Form C Relays per card [4 slots available for I or O cards])
I/O Input Functions
user I/O program + PCB jumpers
(8 Inputs per card [4 slots for I or O cards])
I/O Setup
Memory: save/swap, Operate: run/stop
I/O Programming
Edit (Program): IN, NOT, AND, OR, XOR, POS
itive
, NEG
ative
,
OUT, TR
i
P, SET, CL
ea
R, ARM, DR
o
P, (events/states/logical
operators), (softnodes) and (numeric elements).
Arithmetic operators/elements: KON# (to input constants), ADD,
SUB
tract
, MUL
tiply
, DIV
ide
, MOD
ulus
, EQU
als
, GR
ea
T
er than
,
LES
s than
, and SEL
ect
. Editing: ba
c
ksp
ace
, left/right arrows (to move
cursor), del
ete
, undo, ins
ert
/del
ete
line.
(Front Panel LEDs [4 discrete])
I/O programming elements (see table x in section 5xx and Section 2.2)
(User Front Panel Keys [4])
I/O programming elements (see table x in section 5xx and Section 2.2)
Pendent
Keys
(beyond
specified
Manual Mode use: I/O programming elements
[see table xxx in section 5xx ])
Service Menu values:
[Menu end point: Service
Menu path: Main/Service]
(Test Mode Select)
Test Off, Test On [Test Mode won't remain in effect if power is cycled)
(Seq/Non-seq Mode Select)
Seq(uencing Mode Select en)able, Non-seq(uencing Select enabled)
(Memory Contents)
as is (no modification), purged, factory (defaults) [see section x.2.2xx ]
(Reset)
Arm reset, reset armed [Provide a product reset when back panel power
switch is not accessible. Also, use to generate ACCEPT key if not
present (e.g. to end the Test mode when in the Test mode).]
<
<< move the following depenency lists to end of section 2.22? >>
>
[Prerequisite states that must be in effect for the following parameters to be fully functional]
Film Parameter Dependency List:
Material
Density
Not
Applicable
Material
Z-Factor
N.A.
Setpoint Thickness Limit
N.A.
Final Thickness Limit (Trigger)
Service Menu Parameter: Non Seq / Accept
Setpoint Time Limit
N.A.
Soak 1 P
o
w
e
r
level
Value
N.A.
P
o
w
e
r Ramp 1 Time
(to pwr level)
N.A.
P
o
w
e
r Soak 1 Time
(@ pwr level)
N.A.
Soak 2 P
o
w
e
r
level
Value
N.A.
P
o
w
e
r Ramp 2 Time
(to pwr level)
N.A.
P
o
w
e
r Soak 2 Time
(@ pwr level)
N.A.
Soak 3 P
o
w
e
r
level
Value
N.A.
P
o
w
e
r Ramp 3 Time
(to pwr level)
N.A.
Deposit Rate
(requested)
N.A.
Rate Ramp Mode
N.A.
New Dep
osit
Rate
Value
Film Parameter: Rate Ramp Mode = ON
Rate Ramp Time
Duration
Film Parameter: Rate Ramp Mode = ON
Rate Ramp
(Thickn)
Tr
i
g
ge
r
Point
Film Parameter: Rate Ramp Mode = ON
Control Loop –P
roportional term
- N.A.
Control Loop –I
ntegral term
-
N.A.
Control Loop –D
erivative term
- N.A.
Max
Power
Limit
N.A.
Abort Max P
o
w
e
r SW
N.A.
Max Power Dwell
Film Parameter: Abort Max Power SW = ON