INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 261
p STC-2002
DEPOSITION CONTROLLER
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SECTION 6.XX
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10
SMAXP
Source output max power (additional) percentage.
0.0 to 100.0 percent.
11
SOCHL
Source output analog channel number 1..8
12
MTOOL
Master tooling 10.0-400.0%, like tooling.
13
MINSC
Minimum Starting Contributors, 1..8 .
14
MINRB
Minimum Remaining Backups for good start, 0..7 .
15
PLTUN
Platoon strength, min. # of contrib channels 1..8 .
16
SFAILM
Sensor failure mask, how to recover when averaging mode has a sensor
channel failure (FMSK_class)
0 FMSK_NONE No channel-failure rate-glitch correction.
Whatever happens with missing contributor occurs.
1 FMSK_FULL_MASK Full substitute via aggreg. multi-plier for rate
glitch continuously.
17
RSYN
Rotator synchronization type, none, delayed, feedback
18
RSYNTM
Rotator synchronization time 2..999 secs.
______________________________________________________________________
Table of SnsChnlAtrb_class CPARM# values as third parameter
when second parameter for CHNL# channel 1-8.
----------------------------------------------------------
CPARM# Label
Description
1
SSMOD
Starting Mode: of SMOD_class 1..3
0 SMOD_OFF channel not active
1 SMOD_ACTIVE channel active at start
2
SMOD_STANDBY
channel
needed
as
backup
2
SFOP
Sensor Fail Operation of SFMOD_class 1..2
0 SFMOD_NOTHING no special failure operation
1
SFMOD_FILM_FAIL
film
failure
signalled.
3 SBAKS Sensor Backup list, ordered list of channel numbers
which is saved as long integer form of decimal
list of 8 digits, from 00000000 (0) to 88888888.
Any form not containing the digit 9 and mathematically