INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 20
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 1.XX
e page 18 of 276 ^
Sh
u
t
te
r Delay Mode
N.A.
Sh
u
t
te
r D
e
l
a
y TIMEOUT
Film Parameter: Sh
u
t
te
r Delay Mode = ON
Sh
u
t
te
r D
e
l
a
y QUALITY
Film Parameter: Sh
u
t
te
r Delay Mode = ON
(XTAL)
RATE SAMPLING
N.A.
(XTAL)
SAMPLE INTERVAL
(Film Parameter: (XTAL) RATE SAMPLING = Timed
or
Film Parameter: (XTAL) RATE SAMPLING = Inteli)
(XTAL)
SAMPLE DWELL TIME Film Parameter: (XTAL) RATE SAMPLING = Timed
(XTAL)
SAMPLE QUAL
Film Parameter: (XTAL) RATE SAMPLING = Inteli
(XTAL)
SAMPLE ALARM TIME Film Parameter: (XTAL) RATE SAMPLING = Inteli
FILM Fail Mode
N.A.
C
on
t
ro
l Loop Qual L
imits
N.A.
XT
A
L Stability S
Limits
N.A.
XTAL Life Bounds
N.A.
Plot Vert Sc
a
l
e
V
olts
N.A.
Plot Hor
i
z Sc
a
l
e
H
N.A.
Data
Plot
Type
N.A.
S
ource
S
ensor
MAP SELECT
N.A.
POCKET SELECT
N.A.
ETCHING MODE
N.A.
Main Menu value Dependency List:
Next
Active
Process
(Select)
1
Service
Menu:
Seq
uence
Able + Accept keys (for Sequencing Mode)
2
If N/A, must use START + Reset / Start Proc keys to start a process.
Next
Active
Film
(Select)
1
Service Menu: Non-Seq
uence
+ Accept keys (Non-Sequencing Mode)
2
Review Process
(Select)
Service
Menu:
Seq
uence
Able + Accept keys (for Sequencing Mode)
2
Review Film
(Select)
N.A.
Review S
ource
/S
ensor
Map
(Sel)
N.A.
[NOTE
1
: press to invoke number entry submenu, sequence of 1 or 2 digits is entered or discarded]
Note
2
: [the Seq Able / Non Seq key shows the current mode upon entry into the
Service menu, changing the mode toggles key text and generates the Accept
key that in turn needs to be pressed to accept new mode described on the key
in text]
RunTime Screen parameter Dependency List:
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx Film Parameters
(Crystal Sample Select)
Film Parameter: (XTAL) Rate Sampling = Timed or Intelligent?
Running
in
deposit
mode
(Crystal
Select)
System
Config
Parameter: Need Source/Sensor Card X
Review Source Sensor Map Element Parameters:
Minimum Start Xtal Channels
Minumum Active Xtal Channels
Channel X Start Mode
(Proc
ess
X)
Main Menu Parameter: [Next Process] Digit
Fixed
Front
Panel
START
key:
sequence from N/A to 1
Service Menu: SEQ
uence en
ABLE
[sequencing mode]
Layer X (layer = step)
Review Processes X: ED
I
T: CH
AN
G
E
, INS
ERT
, DEL
ETE
Layers/steps
Service Menu: SEQ
uence en
ABLE
[sequencing mode]
FILM
Review
Processes
X: ED
I
T: CH
AN
G
E
, INS
ERT
, DEL
ETE
films
[sequencing mode]
Review Film X:
[non-sequencing mode]
(Manual mode)
Running Process + Pressing fixed front panel MANUAL key +
attached Pendent