INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 236

p STC-2002
DEPOSITION CONTROLLER
y
SECTION 6.XX
e page 234 of 276 ^
computer in systems with sequencing enabled.
36
LYRADV
Layer Advance, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.
37
PRCRE
Process reset, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.
38
STRTUNC
Process start unconditional, caused by I/O system or host
computer in systems with sequencing enabled.
39
SECTIM
Second metronome timer event, triggered on period of one
second. Usefull for establishing timebase in I/O or host
interfaces.
40
MINTIM
Minutes metronome timer event, triggered on period of one
minute. Usefull for establishing timebase in I/O or host
interfaces.
41
HRSTIM
Hours metronome timer event, triggered on period of one hour.
Usefull for establishing timebase in I/O or host interfaces.
42
BOJDPOS
Begin of deposit cycle, film being processed has begun the
deposit/rate-ramp/deposit-2/manual phase area, after pre-
condition/shutter-delay phases, shutter is open.
43
EOJDPOS
End of deposit cycle, film being processed has left the
deposit/rate-ramp/deposit-2/manual phase area for idle-ramp/idle
or stop phases.
44
EOJFILM
End of Film event, film being processed has reached an idle or
stopped phase.
45
EOJPROC
End of process event, last film in a process sequence has
completed, process is over.
46
STPROC1
Select & Start Process 1, generated via I/O,COMM in sequencing
option unit.
47
STPROC2
Same as STPROC1 except for Process 2.
48
STPROC3
Same as STPROC1 except for Process 3.
49
STPROC4
Same as STPROC1 except for Process 4.
50
STPROC5
Same as STPROC1 except for Process 5.
51
STPROC6
Same as STPROC1 except for Process 6.
52
STPROC7
Same as STPROC1 except for Process 7.
53
STPROC8
Same as STPROC1 except for Process 8.
54
STPROC9
Same as STPROC1 except for Process 9.
55
RRTRIG
Rate Ramp Trigger, causes system to enter the rate ramp on an
external request, providing properly program-med.
56
PHANTOM
Obsolete, no longer used. Was LIMPX.
57
BOJPROC
Begin of job/process, new to STC-2002
58
BOJFILM
Begin of job/film, new to STC-2002
59
RLSFHLD
Release from a film hold condition. Trigger of this event releases
a film FSM to leave film hold and go on to rise/soaks as needed.
60 CILK10
See
CILK00.
61 CILK11
See
CILK00.
62 CILK12
See
CILK00.
63 CILK13
See
CILK00.
64 CILK14
See
CILK00.
65 CILK15
See
CILK00.
66 CILK16
See
CILK00.
67 CILK17
See
CILK00.
68 CILK18
See
CILK00.
69 CILK19
See
CILK00.
70 CILK20
See
CILK00.
71 CILK21
See
CILK00.