INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 217)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 215 of 276 ^
access index: FREQ6 Crystal frequency from Sensor 6 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 6 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 20
Crystal frequency from Sensor 7
access index: FREQ7 Crystal frequency from Sensor 7 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 7 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 21
Crystal frequency from Sensor 8
access index: FREQ8 Crystal frequency from Sensor 8 in centiHz (0.01Hz) resolution [6 MHz looks
like 600,000,000].
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 8 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 22
source 1 power level
access index: POWR1 power level, in units of .1 percent, 0.. 1000, of source 1.
Value Range 0 to 1000
Units .1 Percent
source 1 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 23
source 2 power level
access index: POWR2 power level, in units of .1 percent, 0.. 1000, of source 2.
Value Range 0 to 1000
Units .1 Percent
source 2 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 24
source 3 power level
access index: POWR3 power level, in units of .1 percent, 0.. 1000, of source 3.
Value Range 0 to 1000
Units .1 Percent
source 3 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 25
source 4 power level
access index: POWR4 power level, in units of .1 percent, 0.. 1000, of source 4.
Value Range 0 to 1000
Units .1 Percent
source 4 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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