INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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p STC-2002
DEPOSITION CONTROLLER
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SECTION 3.XX
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Selection of the edit film is indicated at this menu level by the text edit appearing in the path line. The
value following the text edit is the current film for review/edit. Selection of the active film is indicated at
this menu level by the text active appearing near the end of the path line. The value following the text
active is the current active film.
[note: active film selection will be discussed in detail later. An active film is
selected by a process step in sequencing mode and by the NEXT FILM key in non-sequencing mode.]
For each film
there are up to 42 parameters that can be programmed. The film parameters are in the format of a long list,
where you have a viewing window which shows 6 parameters at a time and a cursor (*) within the viewing
window that moves from line to line. The cursor indicates the parameter that is currently changeable. The
UP
↑ and DOWN↓ keys are used to scroll the screen and select the different parameters. When the cursor is
forced beyond the limit of the 6 line window, the page scrolls up/down by five lines plus the line on which
the cursor was last. The BYE key returns the MAIN menu screen.
Changing Parameters
Figure- 3.9: Review Film Menu.
The EDIT (EDT) key brings forth the REVIEW FILM edit screen where the parameter selected by the
cursor is shown by itself. The specific parameter name, its current value, unit value name and value range
appear. On this menu level, scrolling with the arrow keys traverses the list one parameter at a time. If a
screen is password locked, a "LOCK CODE NEEDED" message screen will insert itself when an EDT
entry is attempted (passwords will be discussed shortly).
Figure- 3.10: REVIEW FILM edit screen
Pressing the Change (CHG) key invokes a numeric keypad on which direct number or representative
numeric values are entered. Scrolling at this hierarchical menu level traverses the list one parameter at a
time with one notable exception which is the non-presentation of the list items prefixed with the "-".
REVIEW
FILM
change
(CHG)
entry
screen