INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 136

p STC-2002
DEPOSITION CONTROLLER
y
SECTION 3.XX
e page 134 of 276 ^
To view Control Options...
Screen
Key[s] to press
Run Time
fixed MENU
MAIN MENU
CONTROL OPTIONS
To view OPT/INF (options / info)...
Screen
Key[s] to press
Run Time
fixed MENU
MAIN MENU
EXECUTIVE MENU
EXECUTIVE MENU
OPT/INF
OPT/INF MOR
E
(more pages)
To select ACTIVE FILM (non-sequencing mode only)...
Screen
Key[s] to press
Run Time
fixed MENU
MAIN MENU
NEXT
ACTIVE
FILM
Numeric entry
Digit[s] + ENT
ER
In SEQUENCING mode, the active film is set by the active process.
.
.
films and processes (2.5)
review / edit films (2.5)
film
example:
see
next section (2.7 lead in...)
review / edit processes (2.6)
process
example:
see
next section (2.7 lead in...)
set
active
process
(2.19)
manual power control (2.8)
other run time screen options: crystal, LSQ, SMPL (2.10)
detailed film parameters (2.12)
detailed sys config parameters (2.13 – 2.14)
deposition source control loop desc. (2.15)
shutter
delay
(2.16)
crystal failure processing (2.17)
process
accounting
(2.18)
control options/ options inf/ product ID, diagnostics, check sums
power-up
sequence
factory/purge
parameter
tables
product programming summary tables
Sensor card connections
sensor
(3.8)
.