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INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 136

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 3.XX

e page 134 of 276 ^


To view Control Options...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

CONTROL OPTIONS



To view OPT/INF (options / info)...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

EXECUTIVE MENU

EXECUTIVE MENU

OPT/INF

OPT/INF MOR

E

(more pages)



To select ACTIVE FILM (non-sequencing mode only)...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

NEXT

ACTIVE

FILM

Numeric entry

Digit[s] + ENT

ER

In SEQUENCING mode, the active film is set by the active process.
.




.

films and processes (2.5)

review / edit films (2.5)

film

example:

see

next section (2.7 lead in...)

review / edit processes (2.6)

process

example:

see

next section (2.7 lead in...)

set

active

process

(2.19)

manual power control (2.8)

other run time screen options: crystal, LSQ, SMPL (2.10)

detailed film parameters (2.12)

detailed sys config parameters (2.13 – 2.14)

deposition source control loop desc. (2.15)

shutter

delay

(2.16)

crystal failure processing (2.17)

process

accounting

(2.18)

control options/ options inf/ product ID, diagnostics, check sums

power-up

sequence

factory/purge

parameter

tables

product programming summary tables

Sensor card connections
sensor

(3.8)

.