INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 218)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 216 of 276 ^
Parameter 26 source 5 power level
access index: POWR5 power level, in units of .1 percent, 0.. 1000, of source 5.
Value Range 0 to 1000
Units .1 Percent
source 5 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 27
source 6 power level
access index: POWR6 power level, in units of .1 percent, 0.. 1000, of source 6.
Value Range 0 to 1000
Units .1 Percent
source 6 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 28
source 7 power level
access index: POWR7 power level, in units of .1 percent, 0.. 1000, of source 7.
Value Range 0 to 1000
Units .1 Percent
source 7 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 29
source 8 power level
access index: POWR8 power level, in units of .1 percent, 0.. 1000, of source 8.
Value Range 0 to 1000
Units .1 Percent
source 8 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 30
Sensor 1 thickness
access index: THICK1 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 1. 1 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 31
Sensor 2 thickness
access index: THICK2 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 2. 2 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 32
Sensor 3 thickness
access index: THICK3 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 3. 3 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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