INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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DEPOSITION CONTROLLER
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SECTION 6.XX
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18 PCD_index Indexing to pocket
19 PCD_fhold Film Holding before rise/soaks.
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Parameter 10
Crystal Shutter
Status
Value Range
0,1
Units Open,
Closed
This parameter indicates if the crystal shutter is closed. A returned value of 0 indicate that the shutter is
open (making measurements) and a value of 1 indicates that it is closed. This is a read only parameter.
access: XTLSHUT xtal shutter state, true(1) when using a xtal, false(0) when ignoring data from crystal,
shuttered off. Identical to XTLUSMAP except during sample/hold mode, sensors mapped off to 0 when
hiding. One per active sensor ident (1..8) LSB to MSB.
0 ALL SENSOR SHUTTERS CLOSED, SENSORS NOT USED
1 Sensor # 1 XTLSHUT OPEN
2 Sensor # 2 XTLSHUT OPEN
4 Sensor # 3 XTLSHUT OPEN
8 Sensor # 4 XTLSHUT OPEN
16 Sensor # 5 XTLSHUT OPEN
32 Sensor # 6 XTLSHUT OPEN
64 Sensor # 7 XTLSHUT OPEN
128 Sensor # 8 XTLSHUT OPEN
255 ALL SENSOR SHUTTERS OPENED
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Parameter 11
Sample/Hold Status
Value Range
0 To 2
Units None
This parameter indicates the status of sample/hold operation according to the following table:
0
Sample/Hold Not Active
1 Sampling
2 Holding
This is a read only parameter.
access: SPLHLD sample hold status, of SPLHLD_class.
0 SPLHLD_NUL not being cycled, so current state not important.
1 SPLHLD_SAM sampling, xtal being read for control.
2 SPLHLD_HOL holding, xtal being covered, pretend rate being used to accumulate thickness.
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Parameter 12
Max. Power Limit
Status
Value Range
0,1
Units
False / True
This parameter indicates if the STC-2002 is at the max. power limit (indicated by a flashing power value on
the RunTime display). A value of 0 returned indicates that the STC-2002 is not at the max. power limit.
This is a read only parameter.
access: MAXPL true(1)/false(0) if at max power limit now. One per active source ident (1..8) LSB to
MSB.
0 No sources at MAX power limit.
1 Source # 1 at Max Power limit.
2 Source # 2 at Max Power limit.
4 Source # 3 at Max Power limit.
8 Source # 4 at Max Power limit.
16 Source # 5 at Max Power limit.
32 Source # 6 at Max Power limit.
64 Source # 7 at Max Power limit.
128 Source # 8 at Max Power limit.
255 ALL sources at MAX power limit.