INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 215)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 213 of 276 ^
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Parameter 6
Rate Deviation
access index: RDEVTN rate deviation value, +- 0 .. 999.9 A/s, as 0 .. 9999
Value Range 0 To ±9999
Units 10 X Å/s
This parameter returns the current deviation from the programmed rate setpoint. A negative number
indicates the actual value is below the programmed one. A returned number of -123 indicates that the rate
is 12.3 Å/s below whatever the programmed value is.
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Parameter 7
Crystal Life (primary sensor)
access index: XLIFE crystal life value, 0..99 percent., primary crystal.
Value Range 0 To 99
Units Percent
This parameter returns the percentage of the crystal life that is left on the primary crystal sensor. It is the
same number as on the RunTime display.
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Parameter 8
Sensor Channel And Status (active channel)
access index: XCHNL crystal channel in use.
Value Range 0 To 5
Units None
This is a composite number where the lsb is 0 for sensor 1 selected, 1 for sensor 2 selected; bit 1 is 0 if the
sensor is not good, 1 if it is good; and bit 2 is 0 if the sensor has not failed, and 1 if the sensor has failed. If
bits 1 and 2 are both 0, this indicates that the sensor status is unknown.
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Parameter 9
Crystal Stability Value
access index: XSTAB crystal stability value
Value Range 0 To 99
Units None
The tens digit of this number is incremented when the stability level is violated. The units digit indicates
10 x of range violated to get to the next stability level.
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Parameter 10
Process Quality Value
access index: PQUAL process quality value
Value Range 0 To 99
Units None
The tens digit of this number is incremented when the quality level is violated. The units digit indicates 10
x of range violated to get to the next quality level.
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Parameter 11
Control Quality Value
access index: CQUAL control quality, instantaneous
Value Range 0 To 99
Units Percent
This parameter indicates how good the control loop is. It is the deviation expressed as a percentage of the
setpoint.
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Parameter 12
Sample Hold Time
access index: SHTIME sample hold time
Value Range 0 To 5999
Units Seconds