INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 17)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 15 of 276 ^
S ource S ensor MAP SELECT 1 - 30
POCKET SELECT 0 – 63 Pockets
ETCHING MODE OFF/ON
Process Step elements:
[Menu end point: Review Processes Menu path: Main/Review Processes]
Review Processes (Edit Process) (Edit Process Steps [1-99]) Mode (Sk i p, St o p, Aut o ,
End, Wai t ), Film# (1-99), Thickness (0.0 - 999.999 KÅ)
Main Menu values:
[Menu end point: Main Menu Menu path: fixed front panel MENU key/ Main Menu]
Next Active Process (Select)* 1 of 9 processes [sequencing mode only]
Next Active Film (Select)* 1 of 99 films [non-sequencing mode only]
[*NOTE: press touch key enclosing digit to select 1 of the 9 processes or 99 films (press digits + ENTer on invoked submenu)]
RunTime Screen parameters:
[Menu end point: RunTime screen Menu path: programming Menu/ fixed front panel STATUS key/RunTime screen]
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx
(Crystal Sample Select) (not selected [blank]), SMPL, SMPL+Time, HOLD+Time
START key sequence (fixed front panel)
(Note PROC ess X: message change after each START process key press) 2
STOP key (fixed front panel) Stops the running process (non-seq mode: stops the 1 inherent process [film])
MANUAL key (fixed front panel) Switches to manual mode from a running process only. Toggle action.
ZERO key (fixed front panel) Zeroes the thickness value
MENU key (fixed front panel) Switches from RunTime screen to MAIN menu screen
STATUS key (fixed front panel) Switches to RunTime screen from any menu screen, to detailed power
and crystal info screens from RunTime screen
Zero Power [non-active process] zero ch annel 1-8, zero all [1 st STATUS key press from RunTime]
Zero Thick ness 1 zero ch annel 1-8, zero all, re-verify [2 nd STATUS key press from RunTime]
Force Fail [non-active process] fail ch annel 1-8, fail all, re-verify [2 nd STATUS key press from RunTime]
1 Zero thick ness does not affect film thickness value, only Source Sensor card value (use to set tooling factor, diagnose
problems, etc. )
2 If the PROC ess X: status message does not change when the START key is pressed, check for "STOP: INV alid XXX "
message or check the OPT/INF menu, page 2 for cards not installed which are enabled in software (MIA). Cycle AC power
OFF ON to re-sync.
System Configuration values: [Menu end point: System Config Menu path: Main/Executive menu/System Configuration]
LCD Contrast / Bias LOW, MEDIUM, HIGH
Password Lock # 0 - 9999
(Process) Run Number 0 to 9999
Recorder Function Absolute Rate, Rate Deviat ion , P o w e r, Thickness, Computer Remote, I/O C on tr o l, Off
Recorder Out Ch a n ne l 1 – 8 selects an analog output channel for use (if not off and not used as a source)
Real Clock Time HH/MM
Real Clock Date MM/DD/YY
Need S ource /S ensor Card 1 OFF/ON
Need S ource /S ensor Card 2 OFF/ON
Need S ource /S ensor Card 3 OFF/ON
Need S ource /S ensor Card 4 OFF/ON
I/O Slot 1 Type UNUS ED (DISABLED) / INPUT / OUTPUT
I/O Slot 2 Type UNUS ED (DISABLED) / INPUT / OUTPUT
I/O Slot 3 Type UNUS ED (DISABLED) / INPUT / OUTPUT
I/O Slot 4 Type UNUS ED (DISABLED) / INPUT / OUTPUT
Memory Module IFC OFF/ON
Communication values: [Menu end point: Comm. Setup Menu path: Main/Executive menu/Communications Setup]
COM/IO Lock Code 0 - 9999
Keyboard Beep OFF / ON
RS232 Baud Rate 300, 1200, 2400, 9600
RS232 Protocol Sycon, ASCII