INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 10
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 1.XX
e page 8 of 276 ^
S
ECTION
5.2 ............................................................................................................................................ 153
Boolean Definitions ............................................................................................................................ 153
S
ECTION
5.3 ............................................................................................................................................ 154
States And Events ............................................................................................................................... 154
S
ECTION
5.4 ............................................................................................................................................ 159
Steady State vs. Edges ........................................................................................................................ 159
S
ECTION
5.5 ............................................................................................................................................ 159
Input Functions................................................................................................................................... 159
S
ECTION
5.6 ............................................................................................................................................ 160
Output Functions ................................................................................................................................ 160
S
ECTION
5.7 ............................................................................................................................................ 160
Softnodes And Sync Events ................................................................................................................. 160
S
ECTION
5.8 ............................................................................................................................................ 161
Internal Operations ............................................................................................................................ 161
S
ECTION
5.9 ............................................................................................................................................ 162
Operate Menu..................................................................................................................................... 162
S
ECTION
5.10 .......................................................................................................................................... 162
Memory Menu..................................................................................................................................... 162
S
ECTION
5.11 .......................................................................................................................................... 163
Editing An I/O Program ..................................................................................................................... 163
I/O Programming Tree ....................................................................................................................... 165
S
ECTION
5.12 .......................................................................................................................................... 168
I/O Setup Edit Menu ........................................................................................................................... 168
S
ECTION
5.13 .......................................................................................................................................... 169
Edit/Change Menu.............................................................................................................................. 169
COMPUTER INTERFACING [6.XX]
..................................................................................... 191
S
ECTION
6.0 ............................................................................................................................................ 191
Host Port Interface ............................................................................................................................. 191
THEORY AND CALIBRATION [7.XX]
................................................................................ 261
S
ECTION
7.0
M
EASUREMENT
T
HEORY
.................................................................................................... 261
Equation 1
.......................................................................................................................................... 261
S
ECTION
7.1
C
ALIBRATION
..................................................................................................................... 262
Thickness
............................................................................................................................................ 262
Density Determination....................................................................................................................... 262
Z-Factor Determination
..................................................................................................................... 262
Tooling Dtermination
......................................................................................................................... 262
Material Reference Table:
.................................................................................................................. 264
Aluminum Through Indium
............................................................................................................................. 264
Indium Intimonide Through Terium
................................................................................................................ 265
Thallium Through Zirconium Oxide
................................................................................................................ 266
MAINTENANCE/PROBLEM SOLUTIONS [8.XX]
......................................................... 267
S
ECTION
8.0
............................................................................................................................................ 267
Warnings/Cautions
............................................................................................................................. 267
User Correctable System Problems
.................................................................................................... 267
S
ECTION
8.1
R
EPLACING
A S
ENSOR
C
RYSTAL
....................................................................................... 268
Cautions/Procedural Steps
................................................................................................................. 268
S
ECTION
8.2
P
ERSISTENT
C
RYSTAL
F
AIL
I
NDICATION
........................................................................ 268
Discussion
.......................................................................................................................................... 268
Hardware Issues
................................................................................................................................. 269
S
ECTION
8.3
FAQ
S
................................................................................................................................ 270
S
ECTION
8.4
S
YSTEM
B
ATTERY
A
ND
M
EMORY
C
ONSIDERATIONS
..................................................... 270
Procedure to Change Battery
............................................................................................................. 270