INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 222)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 220 of 276 ^
Parameter 54 xtal stability accumulated from sensor 1
access index: XSTAB1
Value Range 0 To 9
Units None
1 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 55
xtal stability accumulated from sensor 2
access index: XSTAB2
Value Range 0 To 9
Units None
2 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 56
xtal stability accumulated from sensor 3
access index: XSTAB3
Value Range 0 To 9
Units None
3 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 57
xtal stability accumulated from sensor 4
access index: XSTAB4
Value Range 0 To 9
Units None
4 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 58
xtal stability accumulated from sensor 5
access index: XSTAB5
Value Range 0 To 9
Units None
5 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 59
xtal stability accumulated from sensor 6
access index: XSTAB6
Value Range 0 To 9
Units None
6 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 60
xtal stability accumulated from sensor 7
access index: XSTAB7
Value Range 0 To 9
Units None
7 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 61
xtal stability accumulated from sensor 8
access index: XSTAB8
Value Range 0 To 9
Units None
8 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
_____________________________________________________________________