INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 74)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 72 of 276 ^
level is typically used to out gas and condition the source material. A value of 0.0% causes the
RISE/SOAK 1 phases to be skipped.
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Parameter
PWR RAMP 1 TIME
Elapsed Time; Range is 0:00 - 99:59
Units Min:Sec
Ramp Time To Soak 1
This parameter sets the duration of the power ramp from zero power to the power level set by the
soak 1 power value parameter. The source is typically heated slowly enough to permit outgassing and melt
conditioning without causing actual deposition to take place.
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Parameter
PWR SOAK 1 TIME
Elapsed Time; Range is 0:00 - 99:59
Units Min:Sec
Soak 1 Time
This parameter sets the time that the source will remain at the soak 1 power level following the
completion of the ramp to this level.
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Soak 2 Power Value
Parameter
SOAK 2 PWR VALUE
Percentage Value; Range is 0.0 - 100.0
Units Percent
This parameter sets the deposition source power value to be used as the second level of soak
power in the pre-deposition cycle. This power level will be maintained for the duration of the soak 2 timer.
This level is typically used to further out gas and condition the source material and actually begin
depositing material at a low rate. A value of 0.0% causes the RISE/SOAK 2 Phases to be skipped.
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Parameter
PWR RAMP 2 TIME
Elapsed Time; Range is 0:00 - 99:59
Units Min:Sec
Ramp Time to Soak 2
This parameter sets the duration of the power ramp from the soak 1 power value or the idle power
value to the value set by the soak 2 power parameter. The source is typically heated slowly enough to
permit further outgassing and melt conditioning and actual deposition may begin during this time period.
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Parameter
PWR SOAK 2 TIME
Elapsed Time; Range is 0:00 - 99:59
Units Min:Sec
Soak 2 Time
This parameter sets the time that the source will remain at the soak 2 power level following the
completion of the ramp to this level. At the end of this time the deposition phase begins. An external input
can be programmed using the programmable I/O to hold the film at soak until released (Soak Hold).
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Parameter
SOAK 3 PWR VALUE (IDLE PWR)
Percentage Value; Range is 0.0 - 100.0
Units Percent
Idle Power Value
This parameter determines the final (idle) power setting at the completion of the entire deposition
profile. If this power level is zero, a START command will begin a new power profile at rise 1, an idle
power setting other than zero will cause the power profile to begin at rise 2 after a START.
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Parameter
PWR RAMP 3 TIME (IDLE RAMP TIME)
Elapsed Time; Range is 0:00 - 99:59
Units Min:Sec
Idle Ramp Time