INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 7)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 5 of 276 ^
SECTION 1.3
TABLE OF CONTENTS
TITLE PAGE................................................................................................................................................ 1
WARRANTY ................................................................................................................................................ 2
INTRODUCTION [1.XX] ............................................................................................................................ 3
S ECTION 1.0 ................................................................................................................................................ 3
Unpacking Instructions........................................................................................................................... 3
S ECTION 1.1 ................................................................................................................................................ 3
Manual Description: Usage, Organization, Section Contents Summary ............................................... 3
S ECTION 1.2 .................................................................................................................................................... 4
Description of Symbols Found in Manual ........................................................................................................... 4
S ECTION 1.3 T ABLE OF C ONTENTS ...................................................................................................... 5
S ECTION 1.4 .............................................................................................................................................. 11
STC-Spare Parts (included w/ STC-2002 ) ............................................................................................ 11
STC-Optional Parts .............................................................................................................................. 11
S ECTION 1.5 .............................................................................................................................................. 11
STC-Optional Crystal Sensor Parts ...................................................................................................... 11
S ECTION 1.6 .............................................................................................................................................. 12
Contact Information ............................................................................................................................. 12
S ECTION 1.7 .............................................................................................................................................. 13
Product Specifications .......................................................................................................................... 13
S ECTION 1.8 ............................................................................................................................................. 14
Programmable Parameter Lists........................................................................................................... 14
Programmable Parameter Dependency Lists ..................................................................................... 17
S ECTION 1.9 .............................................................................................................................................. 19
Sensor Specifications............................................................................................................................ 19
SIMPLE QUICK GENERALIZED OVERVIEW [2.XX] .................................................. 21
S ECTION 2.0 .............................................................................................................................................. 21
For What Is The STC-2002 Used? [The Problem, The Solution] ......................................................... 21
S ECTION 2.1 .............................................................................................................................................. 22
How Is It Used? .................................................................................................................................... 22
S ECTION 2.2 .............................................................................................................................................. 26
How Does It Work? .............................................................................................................................. 26
Hardware Setup Discussion ................................................................................................................. 29
Sensor Head: Hardware Generalizations............................................................................................. 30
Power Supply Connection .................................................................................................................... 32
Strip Chart Recorder Connection......................................................................................................... 32
RS-232 Communications Connection ................................................................................................... 32
Grounding Stud .................................................................................................................................... 33
Input Card Options............................................................................................................................... 33
Installation/Removal Of Sensor Cards, Input Cards, Output Cards .................................................... 34
Pendant (hand controller) .................................................................................................................... 35
LCD Contrast/Bias ............................................................................................................................... 35
Graphical Display ................................................................................................................................ 35
Mounting .............................................................................................................................................. 35
System Hardware Connections............................................................................................................. 35
Programmable Hardware Setup Discussion ........................................................................................ 36
Select RunTime Mode: Sequencing/Non-Sequencing, Manual Mode, Test Mode ............................................ 36
Memory Storage of Menu Parameters ............................................................................................................... 36
Films & Processes / Active, Non-Active ........................................................................................................... 36
Menu Parameter Dependencies .......................................................................................................................... 36