INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 233)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 231 of 276 ^
access: LAUNCHFNO Launch Film number, accessible when Non-sequencing. Can be set to range
1..LastFilm value and is used to augment use of the event code STARTCPL which starts
whichever film value is stored in LAUNCHFNO.
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Read, Status Information Command Examples
Command F6
Response A1
Description
Query The Status Parameter 6, Active Film #. Active Film # is 1.
Command F9
Response A17
Description
Query The Status Parameter 9, Phase Status. Process Sequence is At Ready Phase.
Command F
10
Response A0
Description
Query The Crystal Shutter Status. Shutter is Non-Eclipsed, Not In Hold Mode.
Table 6.13: Group 5 Examples.
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Write Status Information (G)
Only eight parameters are valid (1,2,3,17,21, 22, 23,24). See above for access.
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Parameter 1
Soak Hold Status
Value Range 0,1
Units False/True
This parameter sets if a soak hold state is desired. A value of 1 forces it to be scheduled. If soak hold is
enabled, this prevents the deposit phase from being entered.
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Parameter 2
Forced Sample
Value Range 0,1
Units Off / On
This parameter forces a sample state On or Off. A value of 1 forces a sample.
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Parameter 3
Manual Controller Status
Value Range 0 To 3
Units None
This parameter forces the status of the manual hand controller. It is used with a command in the next group
called manual pendant update. If you issue either an up or down command, it stays in effect (ramping the
power) until you issue an at rest command.
0 At
Rest
1 Zero
2 Up
3 Down
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Parameter 17
Film Hold
Value Range 0,1
Units False, True
If true, this parameter holds a film at the crystal verify state. The crystal verify state occurs immediately
after a film is started.
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