INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 18)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 16 of 276 ^
Source Sensor Map elements: [Menu end point: Review SS Map Menu path: Main/Review SS Map]
Source Sensor Full Power Volts 2.5, 5, 10 full scale volts
Source Sensor Max P o w e r Value 0.0% - 100.0%
Source Sensor Analog Out put Chnl 1 – 8 Channel Selection
Master Tooling Value 10.0% - 400.0%
Min imum Start Xtal Channel s 1 – 8 minimum channels
Min imum Backup Xtal Channel s 0 – 7 minimum channels
Min umum Active Xtal Channel s 1 – 8 minimum channels
(Xtal) Ch annel Drop Filter NONE, BALANCE [Mask dropped Xtal channel Failure] averaging mode only
Indexer Sync hronization Mode NONE, DELAY, FEEDB AC K
Indexer Sync hronization Time 2 – 999 sec ond s
Ch annel 1 Start Mode OFF, ACT IVE , STANDBY
Ch annel 1 Fail Action (Mode) NONE, ABORT FILM
Ch annel 1 Backup List X – XXXXXXXX (1 item list to 8 item list), [where X = 1 to 8 (in
each position w/o redundancies, list extends to 0-8 for a 1 item list)]
Ch annel 1 Tooling Value 10.0% - 400.0%
Ch annel 1 Weight 10.0% - 400.0%
Ch annel 2 Start Mode OFF, ACT IVE , STANDBY
Ch annel 2 Fail Action (Mode) NONE, ABORT FILM
Ch annel 2 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Ch annel 2 Tooling Value 10.0% - 400.0%
Ch annel 2 Weight 10.0% - 400.0%
Channel 3 Start Mode OFF, ACT IVE , STANDBY [need 2 nd Source Sensor Card for Channels 3 & 4]
Channel 3 Fail Action (Mode) NONE, ABORT FILM
Channel 3 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Channel 3 Tooling Value 10.0% - 400.0%
Channel 3 Weight 10.0% - 400.0%
Channel 4 Start Mode OFF, ACT IVE , STANDBY
Channel 4 Fail Action (Mode) NONE, ABORT FILM
Channel 4 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Channel 4 Tooling Value 10.0% - 400.0%
Channel 4 Weight 10.0% - 400.0%
Channel 5 Start Mode OFF, ACT IVE , STANDBY [need 3 rd Source Sensor Card for Channels 5 & 6]
Channel 5 Fail Action (Mode) NONE, ABORT FILM
Channel 5 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Channel 5 Tooling Value 10.0% - 400.0%
Channel 5 Weight 10.0% - 400.0%
Channel 6 Start Mode OFF, ACT IVE , STANDBY
Channel 6 Fail Action (Mode) NONE, ABORT FILM
Channel 6 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Channel 6 Tooling Value 10.0% - 400.0%
Channel 6 Weight 10.0% - 400.0%
Channel 7 Start Mode OFF, ACT IVE , STANDBY [need 4 th Source Sensor Card for Channels 7 & 8]
Channel 7 Fail Action (Mode) NONE, ABORT FILM
Channel 7 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Channel 7 Tooling Value 10.0% - 400.0%
Channel 7 Weight 10.0% - 400.0%
Channel 8 Start Mode OFF, ACT IVE , STANDBY
Channel 8 Fail Action (Mode) NONE, ABORT FILM
Channel 8 Backup List X – XXXXXXXX, [X = 1 to 8 (in each position w/o redundancies)] see CH1
Channel 8 Tooling Value 10.0% - 400.0%
Channel 8 Weight 10.0% - 400.0%