INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 275
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 10.XX
e page 273 of 276 ^
INDEX
1
1
st
STATUS screen...........................................51
2
2
nd
STATUS screen..........................................51
S
Specifications
Product .........................................................13
T
test mode
Running Process Simulation..3, 23, 26, 36, 42,
48, 62, 122, 128, 271
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