INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 82)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 80 of 276 ^
Selecting the minimum number crystal channels with which to start process
This parameter indicates the minimum number of crystals in the starting group when a process is
begun. To reiterate, this is a START value. The intent is to provide a qualification minimum for run
acceptability. If more than 1, averaging is assumed in conjunction with Channel x Start Mode map
parameter programming to more than 1 active sensor. This is a parameter with global scope.
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Parameter
MIN IMUM BACKUP XTALS
Minimum Number of Backup Crystal Channels: 0 - 7
Units Channels
Selecting the minimum number crystal channels for possible use as backup crystals
This parameter indicates the minimum number of crystals to be used as backup crystals. This is a
parameter with global scope.
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Parameter
MIN IMUM ACTIVE XTALS
Minimum Number of Active Crystal Channels: 1 - 8
Units Channels
Selecting the minimum number crystal channels that are active
This parameter indicates the minimum number of crystals that will be active when a process is
started. The intent is to provide a guard for the minimum constellation of averaging crystal sensors the user
decides are necessary. For a process to run, this value cannot be greater than that of the minimum start xtals
map parameter value. This is a parameter with global scope.
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Parameter
CH ANNEL DROP FILTER
Channel Drop Filter Mask Status: none / balance
Units None
Channel Drop Filter
This parameter enables/disables a filter mask for use during multi-sensor averaging. Each crystal
sensor has a unique map parameter group. Programming 2 or more crystal sensor channels as active
automatically invokes an averaging mode. Lost channels during averaging are handled by this Channel
Drop Filter Mask parameter when enabled. An example of a crystal sensor/channel loss is crystal life
failure. This parameter in the BALANCE setting, provides bumpless rate info if, for example, 3 channels
are averaged and one channel fails and has no assigned backup crystal sensor/channel for the failing
channel. This is done by keeping an historical buffer of the rate info stream for each of the 3 channels in
this example case. When a channel fails (without backup), the historical rate info from each of the 3
channels is used to produce a composite multiplier based on the 3 channels when they were all working that
will be used to fill in for the missing channel's contribution. This is, of course, a simplification for the
purposes of discussion. When averaging, the preferred setting should be BALANCE. The setting of NONE
allows the composite rate to jump when a channel is lost (without a backup). This parameter has no effect
unless in averaging mode. This is a parameter with global scope.
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Parameter
INDEXER SYNC HRONIZATION MODE
Indexer Synchronization: NONE, DELAY, FEEDB AC K
Units None
Indexer Synchronization Mode
This parameter is used to provide pocket information in conjunction with the Film parameters:
Pocket Select and SS MAP SELECT. If indexer sync mode is set for either delay or feedback, then
following an XTAL verify, the indexer activity will commence before arriving at the RISE1 phase. Either a
1 of N or a binary (3 digit) value issued through output relays by I/O programming will select the correct
pocket. If indexer sync mode is set to none, then the POCKET SELECT parameter has no effect. This is a
parameter with global scope.
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Parameter
INDEXER SYNC HRONIZATION TIME
Indexer Synchronization Time: 2 – 999 sec ond s
Units Seconds:
Indexer Synchronization Time