INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 81)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 79 of 276 ^
Detailed Map Parameter Descriptions
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Parameter
SOURCE FULL P O W E R
Full Scale Volts: [enter representative values 1,2,3 respectively] 2.5, 5, 10
Units Volts
Source full power Control Voltage Scale Select
This scales the control voltage of the STC-2002 to match your power supply. Provides versatility
to match supplies whose full power settings are one of these 3 selections. This allows 100% power from
the STC-2002 to be any of 2.5, 5, or 10 volts. (see section 3.9)
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Parameter
SOURCE MAX P O W E R
Percentage Value: 0.0 – 100.0%
Units power %
Source max power Select
This parameter selects the maximum percent of power that will be allowed out of the controlled
power supply (named by the SOURCE OUT PUT CH A N NE L parameter). This parameter and the Film
parameter Max Power Limit are redundant but not without good reason. When a process is running, the
lesser value of these two parameters will be used as the limiting value. Maps are intended to be more
closely associated with the source supply in terms of their definition at setup. One map may be called by
many Films and, as a consequence, a Film may inadvertently set the power at a level beyond what is
desirable for the power supply, wiring, etc. This is a fail safe way to limit a power supply configuration in a
place close to the hardware, that is, in a map configuration.
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Parameter
SOURCE OUT PUT CH A N NE L
Analog Output Channel Selection: 1 - 8
Units Channels
Source Output Channel Select
This parameter selects the channel that will be used as the control voltage output, that is the analog
output from the STC-2002 that controls the power supply that generates the evaporant stream. There are 2
identical analog outputs on each source sensor card with up to four source sensor cards possible. A source
output channel (1-8) can be selected for use here and the other source output channel (per card) can be used
for the strip chart recorder (defined by a System Configuration parameter: recorder out chnl). If the source
output channel parameter and the recorder output channel are set to the same channel, the source output
channel will be used and the recorder function will be lost. If this situation should occur, a reboot will be
necessary to reassign the recorder output.
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Parameter
MASTER TOOLING
TOOLING VALUE RANGE IS 10.0 - 400.0
Units Percent
Master Tooling
The TOOLING parameter is used as a correction factor to compensate for geometric position
differences between the location of the sensor and the target substrate. Each of the 8 possible sensors has
its own tooling factor. If no correction is required, both the substrate and sensor see the material source in
an identical manner and the Tooling Parameter is set to 100%. Generally, if the sensor is farther from the
source than the substrate, the tooling will be set to >100%. If the sensor is closer to the source, the tooling
will be set to < 100%. Master tooling is used in conjunction with the individual tooling for each channel.
The master tooling can be used as a global offset value for individual channel tooling or as a base tooling
value upon which individual channel tooling is added. This is a parameter with global scope.
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Parameter
MIN IMUM START XTALS
Minimum Number of Start Crystal Channels: 1 - 8
Units Channels