INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 22)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 20 of 276 ^
Sensor Specifications
Low Profile P/N 500-042 Right Angle P/N 500-088
Figure 1.1: Standard Sensors.
Operation
Maximum Temperature ............................................................. 200 °C
Water Line and Coax Length .................................................... 30 inches
Sensor Mounting ...................................................................... Rear of Body, #4-40 Tapped
Feedthrough Installation
Water
Connections ................................................................ Two Required
Type ........................................................................... 1/8 inch OD. Stainless Tubing
Flow Rate .................................................................... 0.2 to 0.3 gal/min.
Water Temp................................................................. 50 °C max.
Electrical
Connections ................................................................ One Coaxial Line
Type ........................................................................... MicroDot Miniature
Materials
(in VAC)
Body and Water Lines ............................................... 304 Stainless
Insulators .................................................................... Alumina
Coax Insulator ............................................................ Teflon
Coax Conductor and Shields ...................................... Copper/Silver
Braze Material ............................................................ High VAC Ni/CR/Cu Alloy
Crystal Quartz with Gold Electrodes