INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 228)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 226 of 276 ^
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Parameter 13
Non-Volatile Memory Status
Value Range 0 To 7
Units None
This parameter indicates the status of non-volatile memory according to the following Table:
0 Everything
OK
1 Film Parameter Error
2 I/O Program Error
4 Process Accounting Error
8 Process Sequence
The values are added together to form a composite error number. A returned value of 5 would indicate that
there was a film parameter error and a process accounting error. This is a read only parameter.
access: VMEMS volatile memory status, bit weight composite which indicates which memory regions
have a failed checksum.
0 VMEMS_aok All good is 0.
1 VMEMS_fpms Film params defaulted.
2 VMEMS_iopg IO program defaulted to empty.
4 VMEMS_pact Process accounting region data lost.
8 VMEMS_sequ Process sequence region data lost.
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Parameter 14
Hand Power Pendant INC Button
Value Range 0,1
Units False, True
This parameter is true while the INC button on the hand power pendant is pressed. This is a read only
parameter.
access: PNDUP pendant up power button pushed status, true (1) when pushed.
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Parameter 15
Hand Power Pendant DEC Button
Value Range 0,1
Units False, True
This parameter is true while the DEC button on the hand power pendant is pressed. This is a read only
parameter.
access: PNDWN pendant down power button pushed status, true (1) when pushed.
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Parameter 16
Hand Power Pendant Stop Button
Value Range 0,1
Units False, True
This parameter is true while the STOP button on the hand power pendant is pressed. This is a read only
parameter.
access: PNDSP pendant stop button pushed status, true (1) when pushed.
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Parameter 17
Film Hold
Value Range 0,1
Units False, True
If this parameter is true prior to start of film, film will remain in crystal verify phase until this parameter is
false. Settable via RS232or I/O Logic. This is a read only parameter.
access: FLMHLD film hold, program will stop at FHOLD state when started if this status was true(1).
Requires an event trigger to break out of film hold (RLSFHLD event).
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