INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 238
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 6.XX
e page 236 of 276 ^
S6
104 CNCLPR_S
S7
Reset output power, gun7.
105 CNCLPR_S
S8
Reset output power, gun8.
106 FAILSCL_
CHL1
Fail sensor channel, chnl1.
107 FAILSCL_
CHL2
Fail sensor channel, chnl2.
108 FAILSCL_
CHL3
Fail sensor channel, chnl3.
109 FAILSCL_
CHL4
Fail sensor channel, chnl4.
110 FAILSCL_
CHL5
Fail sensor channel, chnl5.
111 FAILSCL_
CHL6
Fail sensor channel, chnl6.
112 FAILSCL_
CHL7
Fail sensor channel, chnl7.
113 FAILSCL_
CHL8
Fail sensor channel, chnl8.
114 ATRATE_
MEZ
At rate during measurement.
115 STP_IO_A
X1
I/O auxiliary stop 1.
116 STP_IO_A
X2
I/O auxiliary stop 2.
117 STP_IO_A
X3
I/O auxiliary stop 3.
118 STP_IO_A
X4
I/O auxiliary stop 4.
119
STARTCPL
Event which is only available when non-sequencing. When
triggered will request a start of the film which has been written
into SSS_LAUNCHFNO via I/O or parser.
Table 6.15: Event Commands.
*Can be polled with ‘H’ command but not triggered with ‘I’ command.
Note 1: This command is available only through the computer interface. It updates the status set by
parameter 3 of the 'G' command set.
Note 2: This command acknowledges a memory loss condition. Normally, the operator has to push the
MANUAL key to continue past where a memory loss is detected (during the power up phase).
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Command Examples
Command H21
Response A0
Description
Poll whether a setpoint thickness condition has been triggered since the last time polled
by the computer interface (computer). A 0, or False, indicating that the event has not yet taken place.
Command H1
Response A1
Description
Poll whether the system stop event has occurred since the last time a poll was requested
of this event. A 1, or true response, indicating that the event has occurred since the last time polled. Issuing
the poll again will result (most likely) in a 0 response, since no new stop has occurred in the time between
successive polls.