INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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DEPOSITION CONTROLLER
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SECTION 3.XX
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times by using the rate sampling feature of the STC-2002. Five film parameters which pertain to this
feature are described in (Section 2.13).
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Parameter
SAMPLE INTERVAL
Process Time; Range is 0:01 - 99:59
Units
Min:Sec
Sample Interval Time
For either mode of operation this parameter will select the sampling interval of the sensor.
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Parameter
SAMPLE DWELL TIME
Process Time; Range is 0:01 - 99:59
Units
Min:Sec
Sample Dwell Time
For the Timed Mode selection this parameter sets the duration of sensor exposure.
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Parameter
SAMPLE QUALITY
Quality Value; Range is 1 - 50
Units
Percent
Sample Quality
In the Intelligent Mode this parameter sets the control quality required to terminate the exposure
period of the sensor.
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Parameter
SAMPLE ALARM TIME
Process Time; Range is 0:0 - 99:59
Units
Min:Sec
Sample Alarm Time
In the Intelligent Mode this parameter sets the maximum allowable time allowed to complete the
sensor exposure and control operation. The STC-2002 will treat this as a crystal failure when this limit is
exceeded.
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Parameter
FILM FAIL MODE
Meas. Processing: select 1 of 2 choices;
Abort
If
Fail
Complete
On
Time
Power
Units:
None
Enabling Measurement Fail Processing
This parameter allows the user to select the system execution path if it is no longer possible to get
reliable measurement information from the sensor system. This is the last resort choice that will be made
after all other system configuration options have been exhausted. Choice 1) Abort If Fail, will abort the
deposition and set the output power to zero. Choice 2) Complete On Time Power, will set the unit into a
time power completion mode. In this mode the last reliable control power level will be maintained and
thickness accumulation will occur in a simulated fashion until the final thickness setpoint is reached. Post
deposition processing then will occur as programmed.
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Parameter
CTL LOOP QUAL L
Select Value; Range is 0 - 9
Units
None
Control Loop Quality Limit
This parameter is used to set a threshold on acceptable control loop quality. When the threshold is
exceeded a sensor fail condition is assumed and the system will process this condition as configured. A
programmed value of 0 disables this test. A value of one gives the tightest limits (5%).
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