INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 216)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 214 of 276 ^
This is the time remaining in the current sample/hold phase.
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Parameter 13
Crystal Frequency
access index: FREQ Crystal Frequency 5 Mhz to 6 Mhz to .1 hertz, 0 if bad. from primary (when not
averaging) sensor crystal.
Value Range 5000000.0…6000000.0, 0.0 if bad crystal
Units Hz
This is the measured frequency of the active sensing crystal.
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The following parameters (14-61) are the values as reported by physically present and enabled source
sensor card[s].
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Parameter 14
Crystal frequency from Sensor 1
access index: FREQ1 Crystal frequency from Sensor 1 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 1 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 15
Crystal frequency from Sensor 2
access index: FREQ2 Crystal frequency from Sensor 2 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 2 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 16
Crystal frequency from Sensor 3
access index: FREQ3 Crystal frequency from Sensor 3 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 3 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 17
Crystal frequency from Sensor 4
access index: FREQ4 Crystal frequency from Sensor 4 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 4 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 18
Crystal frequency from Sensor 5
access index: FREQ5 Crystal frequency from Sensor 5 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 5 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 19
Crystal frequency from Sensor 6