INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 186)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 5.XX e page 184 of 276 ^
(O64). This rung serves no useful purpose other than to demonstrate the use of one of the four
soft-switch inputs and one of the uncommitted LED indicators. When the unit is running, pressing
the leftmost membrane key will light the LED for the duration of the depression. A slight lag
between activation and deactivation of switch and the tracking of the LED illumination is normal.
Pressing and releasing the front panel switch quickly enough will result in no LED lighting,
demonstrating the need to have inputs persist long enough to be sampled and recognized.
O9
O10
T131
O141
T96
T108
T114
001:
002:
003:
004:
005:
006:
007:
008:
009:
010:
011:
I18 Stopped - Crystal Bad
Crystal Fail
P109
S8
Relay 1
C8
I38
I35
I55
P112
Relay 2
Substrate Shutter Open
I38
Setpoint Thickness
S11
Relay 3
C11
Remote Input 1
Remote Input 2
Unconditional
Process Stop
I0
I1
I45
I46
I47
I48
STOP
Deposit
Rate Ramp
Deposit after Rate Ramp
Time / Power Recovery
OUTPUTS INPUTS
Remote Input 3 Soft Node
I2
I141
Final Thickness
Remote Input 4
I3
Use Sensor 2
Soft Node
Crystal Verify
Relay4
Sensor 2 Selected
Crystal Verify
Trigger
Figure- 5.12: Factory Installed I/O Relay Ladder Notation.
SECTION 5.16
Modulo 100 Counters ID# 400-409
Ten Modulo 100 counters are incorporated into the STC-2002 I/O structure. Each counter is
represented by a unique ID number. The status of these counter states can be used as inputs with the I/O
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