INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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p STC-2002
DEPOSITION CONTROLLER
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SECTION 6.XX
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Read RunTime Data Command Examples
Command
E3 or E 3
Response A-1
Description
Read Deposition Thickness In Angstroms. Thickness is Minus 1 Angstrom.
Command E4
Response A93
Description
Read Phase Timer. Timer is 93 Seconds, Or 1 Minute, 33 Seconds.
Table 6.11: Group 4 Examples.
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Read, Set Status Information
Group 5--
Commands F & G
(F)
Read Status Information. These commands will read certain status data from the STC-2002. This
includes information such as whether the unit is stopped, what film is active, is the unit at max. power, etc.
This information is in a more condensed form then available through the I/O system. The command is the
letter F followed by a parameter number.
(G)
Set Status Information. This forces certain status to occur in the STC-2002. The group command
is the letter G followed by {1|2|3|17|21|22|23|24} = {0|1|2|3}. Note: 2,3 only allowed on G3 = form. There
are only 8 parameter options in this group.
Command: F
Mnemonic: EXCT_rstat
(read
status)
Parameters: [1..66] corresponding to system status types SKHLD..LAUNCHFNO
Description: Requests a read back of status information regarding the current operating
status of the instrument.
Returns:
[RZCD_AOK][status_value] if proper type # (1..66) id was sent. Exact value of
[status_value] depends on the particular parameter for which the data was requested.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc.
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Command: G
Mnemonic: EXCT_wstat
(write
status)
Parameters:
[1,2,3,17,21,22,23,40,66] [assign_delim] [status_value] with 1,2,3,...40,60
corresponding to system status types SKHLD..MCTL, FLMHLD, JAMZPR,
ATRATE, ZERO, IO_SCALAR_ANALOG and LAUNCHFNO. The status_value is
the new intended status value for the status parameter to take on.
Description: Command allowing certain internal status conditions (SKHLD, FORSPL, MCTL,
FLMHLD, JAMZPR, ATRATE, ZERO, XTST, IO_SCALAR_ANALOG and
LAUNCHFNO) to be set to specific status values via the communications interface. See the F
command for status read for valid range of [status_value] argument for a given value of the
status variable selection index (SKHLD, FORSPL, MCTL, FLMHLD, JAMZPR, ATRATE,
ZERO, IO_SCALAR_ANALOG, LAUNCHFNO ).
Returns:
Read, Set Status Information