INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 206)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 204 of 276 ^
Parameter 33
Sample Dwell Time
access: XSDW xtal sample dwell time for timed mode
Value Range 0:01 - 99:59
Units Min:Sec
For the timed mode selection this parameter sets the duration of sensor exposure.
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Parameter 34 Sample Quality
access: XSAC xtal sample accuracy for intel mode
Value Range 1 - 50
Units Percent
In the intelligent mode of rate sampling this parameter sets the control quality required to
terminate the exposure period of the sensor.
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Parameter 35 Sample Alarm Time
access: XSTM xtal sample alarm time for accuracy monitor
Value Range 0:0 - 99:59
Units Min:Sec
In the intelligent mode this parameter sets the maximum allowable time allowed to
complete the sensor exposure and control operation. The STC-2002 will go into time-
power when outside the time limit.
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Parameter 36 Measurement Fail Proc
access: XFMD xtal fail mode, stop or complete on time power
Value Range 0,1
Units 0 is Abort On Fail, 1 is Complete On Time Power
This parameter allows the user to select the system execution path if it is no longer
possible to get reliable measurement information from the sensor system. This is the last
resort choice that will be made after all other system configuration options have been
exhausted. A choice of zero (0) will abort the deposition and set the output power to zero.
A choice of one (1) will set the unit into a time power completion mode. In this mode the
last reliable control power level will be maintained and thickness accumulation will occur
in a simulated fashion until the final thickness setpoint is reached. Post deposition
processing then will occur as programmed.
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(Obsolete)
Parameter 37 Xtal Backup Mode
access: OBSO Was crystal backup switch desired yes/no
Value Range 0,1
Units 0 is Off, 1 is On
This parameter allows crystal sensor switching to automatically take place if a sensor
failure of any type is determined. Thickness and rate control is maintained during the
operation.
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Parameter 38 Ctl Loop Qual
access: CLQU control loop quality limit
Value Range 0 - 9
Units None
This parameter is used to set a threshold on acceptable control loop quality. When the
threshold is exceeded a sensor fail condition is assumed and the system will process this