INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 221)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 219 of 276 ^
Parameter 47 xtal life/status from sensor 2
access index: XLIFE2
Value Range 0 To 99
Units Percent
xtal life/status from sensor 2. 2 nd in a contiguous block of 8. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 48
xtal life/status from sensor 3
access index: XLIFE3
Value Range 0 To 99
Units Percent
xtal life/status from sensor 3. 3 rd in a contiguous block of 8. Associated card needs to be physically installed
and enabled before a reboot.
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Parameter 49
xtal life/status from sensor 4
access index: XLIFE4
Value Range 0 To 99
Units Percent
xtal life/status from sensor 4. 4 th in a contiguous block of 8. Associated card needs to be physically installed
and enabled before a reboot.
______________________________________________________________________
Parameter 50
xtal life/status from sensor 5
access index: XLIFE5
Value Range 0 To 99
Units Percent
xtal life/status from sensor 5. 5 th in a contiguous block of 8. Associated card needs to be physically installed
and enabled before a reboot.
______________________________________________________________________
Parameter 51
xtal life/status from sensor 6
access index: XLIFE6
Value Range 0 To 99
Units Percent
xtal life/status from sensor 6. 6 th in a contiguous block of 8. Associated card needs to be physically
installed and enabled before a reboot.
______________________________________________________________________
Parameter 52
xtal life/status from sensor 7
access index: XLIFE7
Value Range 0 To 99
Units Percent
xtal life/status from sensor 7. 7 th in a contiguous block of 8. Associated card needs to be physically installed
and enabled before a reboot.
______________________________________________________________________
Parameter 53
xtal life/status from sensor 8
access index: XLIFE8
Value Range 0 To 99
Units Percent
8 th in a contiguous block of 8. xtal life/status from sensor 8. Associated card needs to be physically installed
and enabled before a reboot.
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