INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 5)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 3 of 276 ^
SECTION 1.0 Introduction
. specifications/included materials
(no intro here) unpacking .
Unpacking
The
STC-2002 comes with a power cord and connectors for the RS-232 interface, the I/O
interfaces and analog outputs (see the following spare parts included list). If the essential OSC-100A
oscillator or crystals were ordered at the same time, they will also be included. The unit operates from 90
to 264 VAC with no adjustments required. If it is ever necessary to return the unit to Sycon, for any
reason, call and obtain a Return Authorization number (RA#).
Description
The STC-2002 provides both automatic control of single or multi-layer film deposition in either a
production or development environment and improved predictability and repeatability of deposited film
characteristics through dependable digital control of the deposition process. It runs unattended in the fully
automatic mode and provides a wide number of benefits including performance limit access and setting by
the end user.
SECTION 1.1 MANUAL DESCRIPTION
. [please read and understand this manual before proceeding w/ equipment useage] .
Please read and understand the contents of this manual before proceeding with equipment useage in a
working system. This manual will take the reader through the appropriate setup and example steps,
providing along the way, an understanding of how the STC-2002 instrument is used. A test mode is
available from the SERVICE menu for simulated out of system experiments. Crystal sensor head
information is simulated (actually rate info is simulated for the film) allowing setup of various
parameters/programming elements without crystal failure halting the simulated process. The power supply
control voltage output is, however, active while in the test mode. All these terms will be described shortly.
This manual is organized into a number of main sections: specifications, generalized overview,
menu programming specifics and setup, hardware setup, detailed host communications, microbalance
theory and maintenance. If any further assistance is needed, please contact Sycon (see section 1.6).
The specifications section describes STC-2002 product specifics, both hardware and software,
along with related necessary and optional product specifics. The software specifics include programmable
parameter lists. The generalized overview section answers the what, the how is it used and the how does it
work questions about the STC-2002, that is, the solutions this product can provide. This section is intended
to discuss the concepts of main functions and elements with only enough detail to make the
conceptualization clear. In addition, rudimentary specifics are given in a number of other areas as an
introduction or a primer for the next section. This is information you typically only need to look at once.
Experienced users (those familiar with deposition controllers) should at least thumb through this section to
take an inventory of what is available. The menu programming specifics and operational details section
provides detailed information about product programming. Experienced users (those familiar with
deposition controllers) may decide to start here. If some elements are unclear, check back to the previous
section. The table of contents and index are helpful in this pursuit. This section provides descriptions for the
programming of film parameters and process steps, descriptions of menu navigation, descriptions of
screens, descriptions of fixed front panel keys, descriptions of run modes, parameter details, memory
defaults, programming summaries, etc. The hardware setup section describes and illustrates connectors,
interconnections, peripherals, mechanical connections, and the STC-2002 as a component in a larger
system. Detailed host communications are found in the following section x6. See section x7 for