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INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 135

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 3.XX

e page 133 of 276 ^


To view / program I/O Setup...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

EXECUTIVE MENU

EXECUTIVE MENU

I/O SETUP

I/O Setup MENU

arrow[s] ; MEM (memory A or B) ; OPR
(operating status) ; EDT (edit)

( Lock Code, if enabled [see Comm Setup]

numeric entry + ENT (enter) )

I/O Setup Memory menu

SAV (save) ; SWP (swap A

↔B)

I/O Setup Operating Status menu

RUN ; STP (stop)

I/O Setup Edit menu

arrow[s] ; INS (insert) ; DEL (delete) ; CHG
(change)

I/O Setup Edit/Change menu

arrow[s] ; IN (input) ; NOT ; AND ; OR ;
UNDO ; MOR (more) ; POS (positive edge) ;
NEG (negative edge) ; BAK SP (back space) ;
DEL (delete) ; OUT (output) ; TRP (trip) ; SET
; CLR (clear) ; ARM ; DRP (drop) ; ENT
(enter)

I/O Setup Edit/Change menu (numeric entry)

100 (most significant digit, hundreds digit) + 10
(tens digit) + 1 (least significant digit, units
place) ; ENT (enter)



To select Crystal Sensor (set secondary crystal[s] as backup, fail primary, re-verify to reinstate primary)...

Screen

Key[s] to press

(Setup parameters on FILM REVIEW menu
and REVIEW SS MAP menu)

(Film Review: SS MAP SELECT x, Review SS
MAP: XTALS and CH x related parameters)

Run Time

STATUS (press twice)

2

nd

STATUS screen

Use FORCE FAIL to select fail channel and re-
verify



To adjust Power level % manually (first 2 lines using LCD, second 2 lines using pendent)...

Screen

Key[s] to press

Run Time (with deposition running)

fixed MANUAL, fixed STATUS

1

st

STATUS (with deposition running)

↑ (up arrow) increase, ↓ (down arrow) decrease

Run Time (with deposition running)

fixed MANUAL

Run Time (with deposition running)

(Pendent Hand Controller) UP

; DOWN



To select Crystal Stability Indicators "L/Q"...

Screen

Key[s] to press

Run Time

L/Q

Run Time

LOOP

Run Time

QUAL



To select/use Sample and Hold (see System Configuration parameter)...

Screen

Key[s] to press

Run Time

[area below L/Q]

Run Time

SMPL

Run Time

HOLD