INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 135

p STC-2002
DEPOSITION CONTROLLER
y
SECTION 3.XX
e page 133 of 276 ^
To view / program I/O Setup...
Screen
Key[s] to press
Run Time
fixed MENU
MAIN MENU
EXECUTIVE MENU
EXECUTIVE MENU
I/O SETUP
I/O Setup MENU
arrow[s] ; MEM (memory A or B) ; OPR
(operating status) ; EDT (edit)
( Lock Code, if enabled [see Comm Setup]
numeric entry + ENT (enter) )
I/O Setup Memory menu
SAV (save) ; SWP (swap A
↔B)
I/O Setup Operating Status menu
RUN ; STP (stop)
I/O Setup Edit menu
arrow[s] ; INS (insert) ; DEL (delete) ; CHG
(change)
I/O Setup Edit/Change menu
arrow[s] ; IN (input) ; NOT ; AND ; OR ;
UNDO ; MOR (more) ; POS (positive edge) ;
NEG (negative edge) ; BAK SP (back space) ;
DEL (delete) ; OUT (output) ; TRP (trip) ; SET
; CLR (clear) ; ARM ; DRP (drop) ; ENT
(enter)
I/O Setup Edit/Change menu (numeric entry)
100 (most significant digit, hundreds digit) + 10
(tens digit) + 1 (least significant digit, units
place) ; ENT (enter)
To select Crystal Sensor (set secondary crystal[s] as backup, fail primary, re-verify to reinstate primary)...
Screen
Key[s] to press
(Setup parameters on FILM REVIEW menu
and REVIEW SS MAP menu)
(Film Review: SS MAP SELECT x, Review SS
MAP: XTALS and CH x related parameters)
Run Time
STATUS (press twice)
2
nd
STATUS screen
Use FORCE FAIL to select fail channel and re-
verify
To adjust Power level % manually (first 2 lines using LCD, second 2 lines using pendent)...
Screen
Key[s] to press
Run Time (with deposition running)
fixed MANUAL, fixed STATUS
1
st
STATUS (with deposition running)
↑ (up arrow) increase, ↓ (down arrow) decrease
Run Time (with deposition running)
fixed MANUAL
Run Time (with deposition running)
(Pendent Hand Controller) UP
↑ ; DOWN ↓
To select Crystal Stability Indicators "L/Q"...
Screen
Key[s] to press
Run Time
L/Q
Run Time
LOOP
Run Time
QUAL
To select/use Sample and Hold (see System Configuration parameter)...
Screen
Key[s] to press
Run Time
[area below L/Q]
Run Time
SMPL
Run Time
HOLD