INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 276
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 11.XX
e page 274 of 276 ^
[copy
this
page
to
record
film
parameters]
Film Parameters for Film #________ in Process #________:
date___-___-___
(Material)
Density 0.40
to
99.99
gm/cc
(Material)
Z-Factor
0.100
to
9.999
Setpoint Th
ic
k
ness
Lim
it
0.000
to
999.999
KÅ
Final Thickness Limit (Trigger)
0.000 to 999.999 KÅ (non-sequencing only)
Setpoint Time Lim
it
0:00
to
99:59
MM:SS
Soak 1 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 1 Time
(to pwr level)
0 to 99:59 MM:SS
P
o
w
e
r Soak 1 Time
(@ pwr level)
0 to 99:59 MM:SS
Soak 2 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 2 Time
(to pwr level)
0 to 99:59 MM:SS
P
o
w
e
r Soak 2 Time
(@ pwr level)
0 to 99:59 MM:SS
Soak 3 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 3 Time
(to pwr level)
0 to 99:59 MM:SS
Deposit Rate
(requested)
0.0 to 999.9 A/S
Rate Ramp Mode
OFF / ON
New Dep
osit
Rate
(Value)
0.0 to 999.9 A/S
Rate Ramp Time
(Duration)
0:00
to
99:59
MM:SS
Rate Ramp
(Thickn)
Tr
i
g
ge
r
Point
0
to
999.999
KÅ
Control Loop –P
roportional term
-
1
to
9999
Control Loop –I
ntegral term
-
0.0
to
99.9
sec
Control Loop –D
erivative term
-
0.0
to
99.9
sec
Max
Power
Limit
0.0
to
100.0%
Abort Max P
o
w
e
r SW
OFF/ON
Max
Power
Dwell 0:01-99:59
MM:SS
Sh
u
t
te
r
Delay
Mode
OFF,
ON
Sh
u
t
te
r D
e
l
a
y
TIMEOUT
0:01-99:59
MM:SS
Sh
u
t
te
r D
e
l
a
y QUALITY
1-50%
(XTAL)
RATE
SAMPLING
OFF,TIMED,INTELL.
(XTAL)
SAMPLE
INTERVAL
0:01-99:59
MM:SS
(XTAL)
SAMPLE
DWELL
TIME
0:01-99:59
MM:SS
(XTAL)
SAMPLE QUAL
1-50%
(XTAL)
SAMPLE
ALARM
TIME
0:01-99:59
MM:SS
FILM Fail Mode
TIME P
O
W
E
R, ABORT
IF
FAIL
C
on
t
ro
l Loop Qual L
imits
0 to 9
XT
A
L Stability S
(Limits)
0 to 9
XTAL
Life
Bounds
0.0-100.0%
Plot Vert Sc
a
l
e
V
olts
1,
5,
10,
50,
100
Plot Hor
i
z Sc
a
l
e
H
1 to 600 samples
Data Plot Type
Rate /Power /Rate Deviation
S
ource
S
ensor
MAP
SELECT
1
–
30
SELECT
0
–
63
Pockets
ETCHING
MODE OFF/ON