INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 159)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 5.XX e page 157 of 276 ^
115 I - V Istate Sensor Slot A Status: PCB that was initially OK, now fails [6]
116 I - V Istate Sensor Slot B Status: (see Slot A breakout)
117 I - V Istate Sensor Slot C Status: (see Slot A breakout)
118 I - V Istate Sensor Slot D Status: (see Slot A breakout)
119 I - V Istate Source Channel 1 Sensor Head Status: Off, Not Needed [0]
119 I - V Istate Source Channel 1 Sensor Head Status: Active, Contributing [1]
119 I - V Istate Source Channel 1 Sensor Head Status: Dropped, OK Failed [2]
119 I - V Istate Source Channel 1 Sensor Head Status: Failed, no replacem't [3]
119 I - V Istate Source Channel 1 Sensor Head Status: Missing, Config Err [4]
119 I - V Istate Source Channel 1 Sensor Head Status: Standby, backup list [5]
119 I - V Istate Source Channel 1 Sensor Head Status: Switched, fail to bak [6]
120 I - V Istate Source Channel 2 Sensor Head Status: (see Channel 1)
121 I - V Istate Source Channel 3 Sensor Head Status: (see Channel 1)
122 I - V Istate Source Channel 4 Sensor Head Status: (see Channel 1)
123 I - V Istate Source Channel 5 Sensor Head Status: (see Channel 1)
124 I - V Istate Source Channel 6 Sensor Head Status: (see Channel 1)
125 I - V Istate Source Channel 7 Sensor Head Status: (see Channel 1)
126 I - V Istate Source Channel 8 Sensor Head Status: (see Channel 1)
127 I - M Istate Verify Memory: Invalid Section: Film Parameters Area [1]
127 I - M Istate Verify Memory: Invalid Section: I/O Programming Area [2]
127 I - M Istate Verify Memory: Invalid Section: Process Accounting Area [4]
127 I - M Istate Verify Memory: Invalid Section: Process Sequence Area [8]
127 I - M Istate Verify Memory: Invalid Section: Archive fail (to Mem Mod) [16]
127 I - M Istate Verify Memory: Invalid Section: Clone fail (to Dep Contrlr) [32]
127 I - M Istate Verify Memory: Invalid Section: Clone OK [64]
128 I - B Istate Needs Reboot or Service, fatal error
129-149 Available
150 IO - B Ustate Resets / Sets Soak Hold Mode
151 IO - B Ustate Sample Off / On When In Sample/Hold Mode
152 IO - B Ustate Film Hold Off / On (requires event trig leave)
153 IO - M Ustate Set Deposition Power to 'Zero' (Unconditional) [Off = 0, On = 1]
153 IO - M Ustate No Sources Overridden, Source is at System Power [0]
153 IO - M Ustate Source #1 Overridden to Zero Power [1]
153 IO - M Ustate Source #2 Overridden to Zero Power [2]
153 IO - M Ustate Source #3 Overridden to Zero Power [4]
153 IO - M Ustate Source #4 Overridden to Zero Power [8]
153 IO - M Ustate Source #5 Overridden to Zero Power [16]
153 IO - M Ustate Source #6 Overridden to Zero Power [32]
153 IO - M Ustate Source #7 Overridden to Zero Power [64]
153 IO - M Ustate Source #8 Overridden to Zero Power [128]
153 IO - M Ustate All Sources Overridden To Zero Power [255]
154 IO - B Ustate M
easured rate not = desired Rate. (>=), set true when Rate > desired, user clr
155 IO - B Ustate Check if Zeroing is allowed on entering deposit (T = Skip)
156 IO - V Ustate I/O scalar analog out (0-255) times multiplier changes output
157 IO - V Ustate Launch Film number ___
158-169 Available
170-199 IT Event Computer Events 00 To 29
200 IT Event Stop
201 IT / All Evnt/Stat Non-Seq Mode = Proc Start Event Req./ Seq Mode = Soft Node
202 IT / All Evnt/Stat Non-Seq Mode = Generic I/O Start / Seq Mode = Soft Node
203 IT Event Switch to Process 1 and Start it [non-seq mode = to Film]
204 IT Event Switch to Process 2 and Start it [non-seq mode = to Film]
205 IT Event Switch to Process 3 and Start it [non-seq mode = to Film]
206 IT Event Switch to Process 4 and Start it [non-seq mode = to Film]
207 IT Event Switch to Process 5 and Start it [non-seq mode = to Film]
208 IT Event Switch to Process 6 and Start it [non-seq mode = to Film]
209 IT Event Switch to Process 7 and Start it [non-seq mode = to Film]
210 IT Event Switch to Process 8 and Start it [non-seq mode = to Film]
211 IT Event Switch to Process 9 and Start it [non-seq mode = to Film]
212 IT Event Break Process Wait
213 IT Event Restart Film
214 IT Event Start Next Layer
215 IT Event Process Reset / Start
216 IT Event Seq Mode: Unconditional Process Start by I/O or Host Comp.
ID n
u
mber
|
Valid
Func
tions – Type |
C
lass |
Descrip
tion