INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 254)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 252 of 276 ^
Description: Request a readback of a process step's mode setting. Returns a numeric value
corresponding to a mode per the chart below.
List of the Valid modes for a step readback.
0 MODE_end End of recipe, previous step last valid step.
1 MODE_auto Auto-start, this step will run at end of previous automatically.
2 MODE_wait Wait at this step for a process.
3 MODE_skip Skip this step and advance to others, if any, also used for insert.
4 MODE_stop Stop the process run, prepare to reset again.
Returns:
[RZCD_AOK][mode_value] if proper process and step #s were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if step number not valid in specific process program.
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Command: Z
Mnemonic:
EXCT_pwmode (Process write mode)
Parameters: [PROCID] [STEPID] [assign_delim] [MODE_TYPE] where
PROCID identifies target process,
STEPID identifies target step within process,
MODE_TYPE specifies new mode for step from set of types in list below.
Description: Commands STC to set process step's mode to new value. Command is similar to
EXCT_pinsrt 'X' command above except changes mode of existing step rather than inserting new
one. Changing mode to MODE_end truncates the rest of process recipe, freeing up step memory to
available list (see V command EXCT_pavail above).
List of modes to set step to.
0 MODE_end End of recipe, previous step last valid step.
1 MODE_auto Auto-start, this step will run at end of previous automatically.
2 MODE_wait Wait at this step for a process.
3 MODE_skip Skip this step and advance to others, if any, also used for insert.
4 MODE_stop Stop the process run, prepare to reset again.
Returns:
[RZCD_AOK] if proper process, step and mode numbers were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if the requested step number is beyond the last valid step in the program or the
instrument is running a process and the selected process is the active process and the step
being alterred is the current active layer step. Programming the mode for steps other than
the current active step is valid and allowed.
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Command: a
Mnemonic: EXCT_prfilm
(Process read film)
Parameters: [PROCID] [STEPID] where PROCID is 1..9 and STEPID is step selector 1..99.
Description: Request a readback of a process step's film number setting. Returns a numeric value
(1..99) identifying the film program which the process step will execute when active.
Returns:
[RZCD_AOK][film_value 1..99] if proper process and step #s were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if step number not valid in specific process program.