INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 126)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 124 of 276 ^
1.) Beginning from the factory setting (see fig. 3.17), press the edit (EDT) key to bring forth the process
edit menu.
2.) Move the cursor to step 01.
3.) Press the insert (INS) key until the END is on step 07. This action inserts 5 lines with default values.
4.) Move the cursor back to step 01.
5.) Press the change (CHG) key to bring forth the process edit/change menu.
6.) Press the thickness (THK) key and enter the thickness value found in fig. 2.11: 2, 0, 0, ENT.
7.) Press the down arrow
↓ key to cursor to step 02.
8.) a.) Press the mode (MOD) key and enter the mode found in fig. 2.11.
b.) Press the film (FLM) key and enter the film# found in fig. 2.11.
c.) Press the thickness (THK) key and enter the thickness value in fig. 2.11.
In a similar fashion, program the next four layers of process 1 to look like the display shown in Figure 3.11.
Press the arrow down key to edit the each consecutive line. The most expedient strategy would be to
follow procedure# 8 above. Some of the steps will not require a film entry as the default value will be
correct. Use BAK and BYE to return to the MAIN menu (press fixed STATUS key to return immediately
to Run Time screen.